JPS62122338U - - Google Patents
Info
- Publication number
- JPS62122338U JPS62122338U JP900486U JP900486U JPS62122338U JP S62122338 U JPS62122338 U JP S62122338U JP 900486 U JP900486 U JP 900486U JP 900486 U JP900486 U JP 900486U JP S62122338 U JPS62122338 U JP S62122338U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chemical liquid
- chemical
- chuck part
- spouted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims 3
- 230000005684 electric field Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP900486U JPS62122338U (id) | 1986-01-24 | 1986-01-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP900486U JPS62122338U (id) | 1986-01-24 | 1986-01-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62122338U true JPS62122338U (id) | 1987-08-03 |
Family
ID=30793908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP900486U Pending JPS62122338U (id) | 1986-01-24 | 1986-01-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62122338U (id) |
-
1986
- 1986-01-24 JP JP900486U patent/JPS62122338U/ja active Pending
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