JPS62120347U - - Google Patents

Info

Publication number
JPS62120347U
JPS62120347U JP804186U JP804186U JPS62120347U JP S62120347 U JPS62120347 U JP S62120347U JP 804186 U JP804186 U JP 804186U JP 804186 U JP804186 U JP 804186U JP S62120347 U JPS62120347 U JP S62120347U
Authority
JP
Japan
Prior art keywords
pipe
steam
inert gas
pure water
semiconductor wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP804186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342678Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP804186U priority Critical patent/JPH0342678Y2/ja
Publication of JPS62120347U publication Critical patent/JPS62120347U/ja
Application granted granted Critical
Publication of JPH0342678Y2 publication Critical patent/JPH0342678Y2/ja
Expired legal-status Critical Current

Links

JP804186U 1986-01-23 1986-01-23 Expired JPH0342678Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP804186U JPH0342678Y2 (OSRAM) 1986-01-23 1986-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP804186U JPH0342678Y2 (OSRAM) 1986-01-23 1986-01-23

Publications (2)

Publication Number Publication Date
JPS62120347U true JPS62120347U (OSRAM) 1987-07-30
JPH0342678Y2 JPH0342678Y2 (OSRAM) 1991-09-06

Family

ID=30792056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP804186U Expired JPH0342678Y2 (OSRAM) 1986-01-23 1986-01-23

Country Status (1)

Country Link
JP (1) JPH0342678Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6321836A (ja) * 1986-07-15 1988-01-29 Rohm Co Ltd 半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6321836A (ja) * 1986-07-15 1988-01-29 Rohm Co Ltd 半導体製造装置

Also Published As

Publication number Publication date
JPH0342678Y2 (OSRAM) 1991-09-06

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