JPS62120339U - - Google Patents
Info
- Publication number
- JPS62120339U JPS62120339U JP703786U JP703786U JPS62120339U JP S62120339 U JPS62120339 U JP S62120339U JP 703786 U JP703786 U JP 703786U JP 703786 U JP703786 U JP 703786U JP S62120339 U JPS62120339 U JP S62120339U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- semiconductor wafer
- plate
- diffusion
- serves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 238000009792 diffusion process Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000012768 molten material Substances 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
Description
第１図ａ，ｂは本考案の一実施例を示す正面図
、断面図、第２図は本考案の他の実施例を示す一
部断面図による斜視図、第３図ａ，ｂは従来のこ
の種の石英ボートの一例を示す正面図、断面図で
ある。
１……半導体ウエハ、２……拡散ソースとなる
板状材、３ａ……石英ボート、３１ａ，３２ａ，
３３ａ……石英ボート３ａを構成する石英棒、３
１１ａ……溝。
Figures 1a and b are a front view and a sectional view showing one embodiment of the present invention, Figure 2 is a partially sectional perspective view showing another embodiment of the present invention, and Figures 3a and b are conventional FIG. 2 is a front view and a sectional view showing an example of this type of quartz boat. 1... Semiconductor wafer, 2... Plate material serving as a diffusion source, 3a... Quartz boat, 31a, 32a,
33a...Quartz rod 3 constituting the quartz boat 3a
11a... Groove.
Claims (1)
に該半導体ウエハと拡散ソースとなる板状材を保
持する石英棒からなる石英ボートにおいて、半導
体ウエハと拡散ソースとなる板状材を底部で支え
る石英棒に拡散中に上記板状材から溶け出す溶融
物を溜めて該溶融物が石英管の内壁に流れ込むこ
とを防ぐ溝を設けたことを特徴とする石英ボート
。 In a quartz boat consisting of a quartz rod that holds the semiconductor wafer and a plate-shaped material that serves as a diffusion source in a quartz tube when impurity diffusion of a semiconductor wafer is performed, the quartz rod that supports the semiconductor wafer and the plate-shaped material that serves as a diffusion source at the bottom. A quartz boat, characterized in that the quartz boat is provided with a groove for collecting the molten material melting from the plate material during diffusion and preventing the molten material from flowing into the inner wall of the quartz tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP703786U JPS62120339U (en) | 1986-01-21 | 1986-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP703786U JPS62120339U (en) | 1986-01-21 | 1986-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62120339U true JPS62120339U (en) | 1987-07-30 |
Family
ID=30790118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP703786U Pending JPS62120339U (en) | 1986-01-21 | 1986-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62120339U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167625A (en) * | 1980-11-24 | 1982-10-15 | Ee Esu Kiyuu Bootsu Inc | Quartz boat for machining semiconductor wafer |
-
1986
- 1986-01-21 JP JP703786U patent/JPS62120339U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167625A (en) * | 1980-11-24 | 1982-10-15 | Ee Esu Kiyuu Bootsu Inc | Quartz boat for machining semiconductor wafer |