JPS62119408A - 光学式変位測定装置 - Google Patents

光学式変位測定装置

Info

Publication number
JPS62119408A
JPS62119408A JP25845385A JP25845385A JPS62119408A JP S62119408 A JPS62119408 A JP S62119408A JP 25845385 A JP25845385 A JP 25845385A JP 25845385 A JP25845385 A JP 25845385A JP S62119408 A JPS62119408 A JP S62119408A
Authority
JP
Japan
Prior art keywords
bright spot
lens
image
measurement surface
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25845385A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222321B2 (enrdf_load_stackoverflow
Inventor
Shigeru Kitahara
北原 繁
Seiji Kuroda
聖治 黒田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Materials Science
Original Assignee
National Research Institute for Metals
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Institute for Metals filed Critical National Research Institute for Metals
Priority to JP25845385A priority Critical patent/JPS62119408A/ja
Publication of JPS62119408A publication Critical patent/JPS62119408A/ja
Publication of JPH0222321B2 publication Critical patent/JPH0222321B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Automatic Focus Adjustment (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP25845385A 1985-11-20 1985-11-20 光学式変位測定装置 Granted JPS62119408A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25845385A JPS62119408A (ja) 1985-11-20 1985-11-20 光学式変位測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25845385A JPS62119408A (ja) 1985-11-20 1985-11-20 光学式変位測定装置

Publications (2)

Publication Number Publication Date
JPS62119408A true JPS62119408A (ja) 1987-05-30
JPH0222321B2 JPH0222321B2 (enrdf_load_stackoverflow) 1990-05-18

Family

ID=17320421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25845385A Granted JPS62119408A (ja) 1985-11-20 1985-11-20 光学式変位測定装置

Country Status (1)

Country Link
JP (1) JPS62119408A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS646810A (en) * 1987-06-30 1989-01-11 Toyota Motor Corp Optical scanning type displacement sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS646810A (en) * 1987-06-30 1989-01-11 Toyota Motor Corp Optical scanning type displacement sensor

Also Published As

Publication number Publication date
JPH0222321B2 (enrdf_load_stackoverflow) 1990-05-18

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Legal Events

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EXPY Cancellation because of completion of term