JPS62118552A - Cooling structure of integrated circuit - Google Patents
Cooling structure of integrated circuitInfo
- Publication number
- JPS62118552A JPS62118552A JP25757285A JP25757285A JPS62118552A JP S62118552 A JPS62118552 A JP S62118552A JP 25757285 A JP25757285 A JP 25757285A JP 25757285 A JP25757285 A JP 25757285A JP S62118552 A JPS62118552 A JP S62118552A
- Authority
- JP
- Japan
- Prior art keywords
- heat radiating
- block
- fixing
- cooling jacket
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
Abstract
Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は、集積回路の冷却構造に関するものである。[Detailed description of the invention] [Industrial application field] The present invention relates to a cooling structure for an integrated circuit.
[従来の技術]
従来の技術としては、例えば特開昭52−8776にて
公知の冷却装置がある。ここで述べられている構造は、
tjSs図に示す様に、基板21に集積回路を複数搭載
したマイクロパッケージ20をコネクタ22に実装し、
これを更にパネル23に実装する。又基板21の集積回
路の搭載面とは反対の面に熱交換器24をあてて、熱交
換器24の内部に水などの冷媒液を流して冷却する構成
である。第6図は熱交換器24の縦断面図を示し、底面
には可撓性の穂い壁26を有する。ここでマイクロパッ
ケージ20の集積回路搭載面とは反対側の面である放熱
筒25(第5図参照)は、基板21上に多層の印刷配線
の形成時や集積回路チップの取付は時に加わる熱により
、必ずしも平坦ではなくなる。しかし、集積回路にて発
生した熱を効率良く移送するためには、熱交換器24の
可撓性壁26を放熱面25に密着させ両者の間隙を小さ
くすることが必要であり、そり・うねりφ変形等の平坦
性の欠如は好ましくない。しかるに本引例では、熱交換
器24の内部を流れる水の圧力により、可撓性壁26が
第6図中一点鎖線で示す如く変形し、放熱面13に水圧
で押しつけることで解決を図っている。[Prior Art] As a conventional technology, there is a cooling device known in, for example, Japanese Patent Laid-Open No. 52-8776. The structure described here is
As shown in the figure, a micro package 20 having a plurality of integrated circuits mounted on a substrate 21 is mounted on a connector 22,
This is further mounted on the panel 23. Further, a heat exchanger 24 is placed on the surface of the substrate 21 opposite to the surface on which the integrated circuit is mounted, and a refrigerant liquid such as water is allowed to flow inside the heat exchanger 24 for cooling. FIG. 6 shows a longitudinal cross-sectional view of the heat exchanger 24, which has a flexible spike wall 26 on the bottom surface. Here, the heat dissipation tube 25 (see FIG. 5), which is the surface of the micro package 20 opposite to the integrated circuit mounting surface, is designed to absorb heat that is sometimes applied when forming multilayer printed wiring on the substrate 21 or when installing an integrated circuit chip. Therefore, the surface is not necessarily flat. However, in order to efficiently transfer the heat generated in the integrated circuit, it is necessary to bring the flexible wall 26 of the heat exchanger 24 into close contact with the heat radiation surface 25 and reduce the gap between the two. Lack of flatness such as φ deformation is undesirable. However, in this reference, the flexible wall 26 is deformed by the pressure of the water flowing inside the heat exchanger 24 as shown by the dashed line in FIG. .
[解決すべき問題点]
−1;述した従来の冷却の冷却装置において、熱交換器
24の底面に設けられた可撓性壁26は、可撓性を持た
せるために、特に薄い銅等より成る板材を使用しており
、本引例では厚さ0.05m mm0.25 mmが好
適であるとしている。この様な薄板を使用しているため
、熱抵抗を決定する一要因である熱交換器24へ押しつ
ける圧力、すなわち水圧を大きくできず、基板21と熱
交換器24との間の低熱抵抗化の妨げになっていた。ま
た熱交換器24はマイクロパッケージ20を交換する際
、操作するものであり、可撓性壁26の強度が弱いため
取扱いに1−分注意する必要があり、誤れば水漏れとい
う重大す曽々を招く危険があるという問題点があった。[Problems to be solved] -1; In the conventional cooling device described above, the flexible wall 26 provided on the bottom of the heat exchanger 24 is made of a particularly thin copper or the like in order to have flexibility. In this reference, it is said that a thickness of 0.05 mm to 0.25 mm is suitable. Because such a thin plate is used, it is not possible to increase the pressure that is pressed against the heat exchanger 24, which is one of the factors that determines the thermal resistance, that is, the water pressure. It was a hindrance. In addition, the heat exchanger 24 is operated when replacing the micro package 20, and since the strength of the flexible wall 26 is weak, it is necessary to handle it with care, and if it is mistaken, water leakage may occur, which is a very serious problem. There was a problem in that there was a risk of causing
[問題点の解決手段]
本発明は−に記問題点を解決したものであり、基板と、
該基板−1−に実装された集積回路と、前記基板の集積
回路実装面とは反対の面に固着剤にて固着され、かつ固
着面とは反対側の面がモ坦面とされ、垂直な数本のスリ
ットが前記固着面及びその反対側面より互い違いに刻入
されてなるスリブi・部が設けられ、かつネジ穴を右す
るi17.板状の放熱ブロックと、前記ネジ穴に対応し
た位置に貫通穴を有し、該貫通穴にネジを通し、前記ネ
ジ穴に締め付けることにより、前記放熱ブロックの平坦
面上に重ねて増刊けられ、該平坦面と接する面が平坦で
ある熱交換器とにより構成されるものであ[実施例]
次に、その実施例を図面を参照して説明する。[Means for solving the problems] The present invention solves the problems described in -, and includes a substrate,
The integrated circuit mounted on the substrate -1- is fixed to the surface of the substrate opposite to the integrated circuit mounting surface with an adhesive, and the surface opposite to the fixed surface is the movable surface, and the surface is vertical. A sleeve i portion is provided in which several slits are cut alternately from the fixing surface and the opposite side thereof, and the screw hole i17. A plate-shaped heat dissipation block and a through hole at a position corresponding to the screw hole, and by passing a screw through the through hole and tightening the screw into the screw hole, an additional issue can be stacked on the flat surface of the heat dissipation block. , and a heat exchanger whose surface in contact with the flat surface is flat. [Embodiment] Next, an embodiment thereof will be described with reference to the drawings.
第1図は本発明に係る集積回路の冷却構造の一実施例の
分解斜視図、第2図は上記構造の横断面図である。FIG. 1 is an exploded perspective view of an embodiment of an integrated circuit cooling structure according to the present invention, and FIG. 2 is a cross-sectional view of the structure.
第1図、第2図中、印刷基板2のマザ−ボード9側面に
は集積回路3が多数配置され、両者は電気的・機械的に
接続・支持されている。印刷基板2の集積回路3の搭載
面とは反対側の面に半日または熱伝導率の良い銀入り接
着剤等の固着剤4により放熱ブロック5が固着され、両
者が一体化されモジュール1が形成される。放熱ブロッ
ク5は固着面の反対面が特に平坦に加工されて平坦面5
aとされ、又両面より垂直な数本のスリットを互い違い
に刻入してスリット部6が数ケ所設けられ、また複数の
ネジ穴7があり、後述する水冷ジャケット8の取付けに
使用される。放熱ブロック5を固着する固着剤4に半田
等を使用する場合は、印刷基板2の固着面をあらかじめ
メタライズしておく。固着することにより、従来技術に
て説明した印刷基板2のそり・うねりと放熱ブロック5
の固着面のそり争うねり・変形から生じる間隙は固着剤
4により埋められることになる。ここで印刷基板2と放
熱ブロック5の材質で熱膨張率が異なる場合、固着時や
実使用時の温度差によりそりが生じることが考えられる
。1 and 2, a large number of integrated circuits 3 are arranged on the side surface of a motherboard 9 of a printed circuit board 2, and both are electrically and mechanically connected and supported. A heat dissipation block 5 is fixed to the surface of the printed circuit board 2 opposite to the surface on which the integrated circuit 3 is mounted using an adhesive 4 such as a semicircular adhesive or a silver-containing adhesive with good thermal conductivity, and the two are integrated to form the module 1. be done. The heat dissipation block 5 has a flat surface 5 with the surface opposite to the fixed surface processed to be particularly flat.
A, and several slit portions 6 are provided by alternately cutting several perpendicular slits from both sides, and there are a plurality of screw holes 7, which are used for attaching a water cooling jacket 8, which will be described later. When using solder or the like as the adhesive 4 for fixing the heat dissipation block 5, the fixing surface of the printed circuit board 2 is metalized in advance. By fixing, the warpage and waviness of the printed circuit board 2 and the heat dissipation block 5 explained in the prior art are avoided.
The gap caused by the warping and deformation of the bonding surface is filled with the bonding agent 4. If the materials of the printed circuit board 2 and the heat dissipation block 5 have different coefficients of thermal expansion, warping may occur due to the temperature difference during fixation or actual use.
しかしながら本発明では、放熱ブロック5にスリットを
両面より入れたスリット部6を設けであることにより、
第3図の如く、放熱ブロック5は固着面に平行などの面
をみてもスリットで分断され、いくつかの部分に分けら
れているので、その個々の部分はおのおのそり変形を生
じても他の部分の変形の影響は柔らかなスリット部6が
印刷基板2側のそりをもどそうという力により変形して
吸収される。したがって、第4図の印刷基板2及び放熱
ブロック5の如くスリッ)を入れてないもの(そりfJ
、 l 7 とする)と同じ曲率でそっても、個々の
部分のスパンが小さいためそりM文】は小さくおさえら
れる(11<u2)。したがって放熱ブロフク5の材質
は熱伝導率の良い金属であれば、熱膨張率が印刷基板2
と少々異なっても良いので選択の幅も広く、安価なもの
が使用できる。However, in the present invention, by providing the heat dissipation block 5 with the slit portion 6 in which slits are inserted from both sides,
As shown in Fig. 3, the heat dissipation block 5 is divided by slits and divided into several parts even when viewed from a plane parallel to the fixed surface, so even if each part is warped and deformed, The influence of the deformation of the portion is absorbed by the soft slit portion 6 being deformed by the force that undoes the warpage on the printed circuit board 2 side. Therefore, the printed circuit board 2 and heat dissipation block 5 shown in FIG.
, l 7 ), the curvature M can be kept small (11<u2) because the span of each part is small. Therefore, if the material of the heat dissipation block 5 is a metal with good thermal conductivity, the thermal expansion coefficient will be lower than that of the printed circuit board 2.
Since it may be slightly different from the above, there is a wide range of choices, and inexpensive ones can be used.
モジュール1は、第1図、第2図の如くマザーボード9
に実装されたコネクタ10に装着され、枠状のホルダー
11がモジュール1の外縁を押さえ込むことにより、コ
ネクタ10にモジュール1が電気的に接続され、保持さ
れる。さらにモジュールlの放熱ブロック5の上面、即
ち平坦面5aに水冷ジャケット8が重ねられ、複数のネ
ジ12が水冷ジャケット8の貫通穴13を貫通して放熱
ブロック5のネジ穴7に締められ、両者が接合・固定さ
れる。水冷ジャケット8の放熱ブロック5と接する面は
特に平坦に加工され平坦面8aとされている。ネジ12
下締めつけられることにより放熱ブロック5の1liJ
jj而5aのそりは、スリット部6に吸収され、強制的
に水冷ジャケット8の平坦面8aと密rfさ廿られ、3
1i−坦面5a、8a間即ち接合面間の間隙はほぼ零と
なる。The module 1 has a motherboard 9 as shown in FIGS. 1 and 2.
When the frame-shaped holder 11 presses the outer edge of the module 1, the module 1 is electrically connected to the connector 10 and held. Furthermore, a water cooling jacket 8 is stacked on the upper surface of the heat radiation block 5 of the module l, that is, the flat surface 5a, and a plurality of screws 12 are passed through the through holes 13 of the water cooling jacket 8 and tightened into the screw holes 7 of the heat radiation block 5, so that both are joined and fixed. The surface of the water cooling jacket 8 that comes into contact with the heat radiation block 5 is particularly processed to be flat and has a flat surface 8a. screw 12
1liJ of the heat dissipation block 5 by being tightened downward.
The warp of 5a is absorbed by the slit part 6, and is forcibly connected to the flat surface 8a of the water cooling jacket 8, and the 3
1i - The gap between the flat surfaces 5a and 8a, that is, the gap between the joint surfaces becomes almost zero.
次に、その動作につき説明する。水が水冷ジャケット8
内部の管路、氷山+−1’ii’15へと流れている。Next, the operation will be explained. water cooling jacket 8
It flows into an internal conduit, Iceberg+-1'ii'15.
集積回路3にて発生した熱は印刷基板2に伝わり固着剤
4を通じて放熱ブロック5に移動する。固着剤4は前述
した様に印刷基板2と放熱ブロック5の間の隙を埋め空
気層が無いので、基板2−放熱ブロック5間の熱抵抗を
小さくできる。Heat generated in the integrated circuit 3 is transmitted to the printed circuit board 2 and transferred to the heat dissipation block 5 through the adhesive 4. As described above, the adhesive 4 fills the gap between the printed circuit board 2 and the heat radiation block 5 and there is no air layer, so that the thermal resistance between the board 2 and the heat radiation block 5 can be reduced.
放熱ブロック5と水冷ジャケット8の間はネジ12によ
り強固に密着させられるので、熱抵抗も小さくできる。Since the heat dissipation block 5 and the water cooling jacket 8 are firmly attached to each other by the screws 12, the thermal resistance can also be reduced.
この様に8源から熱交換を行なう水冷ジャケット8まで
の低熱抵抗化が可能である。また水冷ジャケット8の熱
交換面は、従来の様に可撓+1を持たせるために薄板で
ある必要はなく厚板で構成するため機械的な強度は十分
に有る。なお、本実施例では水冷ジャケット8を搭載し
た水冷方式を述べたがフィンを持つ底面が平坦なヒート
シンクを装着すれば空冷方式にても実現できる。In this way, it is possible to reduce the thermal resistance from the 8 sources to the water cooling jacket 8 that performs heat exchange. Further, the heat exchange surface of the water cooling jacket 8 does not need to be a thin plate in order to have flexibility +1 as in the conventional case, but is made of a thick plate, so it has sufficient mechanical strength. In this embodiment, a water-cooling system equipped with a water-cooling jacket 8 has been described, but an air-cooling system can also be realized by installing a heat sink with fins and a flat bottom surface.
[発明の効果]
以上説明したように、本発明は、基板の放熱面に平坦な
面を有し、数ケ所にスリット部が設けられた放熱ブロッ
クを固着剤にて固着し、放熱ブロックの面上に平坦な面
をもつ水冷ジャケットをネジで締めつけるようにしてい
るため、スリット部が放熱ブロックのそりを吸収して水
冷ジャケットに密着させ、熱抵抗を小さくでき、また、
そのために印刷基板と熱膨張率の等しい材料を使用しな
くてもよいため安価にできる。また、保守時操作をする
熱交換器である水冷ジャケットを厚板構成でき機械的に
強固にできるという効果がある。[Effects of the Invention] As explained above, the present invention has a heat dissipating block that has a flat heat dissipating surface of a substrate and has slits in several places, and fixes the heat dissipating block with an adhesive, so that the surface of the heat dissipating block is fixed. Since the water cooling jacket with a flat surface on top is tightened with screws, the slit absorbs the warpage of the heat dissipation block and brings it into close contact with the water cooling jacket, reducing thermal resistance.
Therefore, it is not necessary to use a material having the same coefficient of thermal expansion as that of the printed circuit board, so the cost can be reduced. In addition, the water cooling jacket, which is a heat exchanger that is operated during maintenance, can be constructed of a thick plate, making it mechanically strong.
第1図は本発明に係る集積回路の冷却構造の一実施例の
分解斜視図、第2図は」−記構造の横断面図、第3図及
び第4図は夫々上記構造の印刷基板及び放熱ブロックの
組伺体、及び放熱ブロックにスリット部のない場合の同
様の組付体のそり状態を比較して示す図、第5図は従来
の集積回路の冷却構造の分解斜視図、第6図は従来構造
の熱交換器の横断面図である。
l:モジュール 2:印刷基板
3:集積回路 4:固着剤
5:放熱ブロック 5a、6d:平坦面6:スリット
部 7:ネジ穴
8:水冷ジャケット 9:マザーボードlO:コネクタ
ll:ホルダー
12:ネジ 13:貫通穴
14:水入[1管 15:水1旧1管20:マイク
ロパッケージFIG. 1 is an exploded perspective view of an embodiment of an integrated circuit cooling structure according to the present invention, FIG. 2 is a cross-sectional view of the structure shown in FIG. Figure 5 is an exploded perspective view of a conventional integrated circuit cooling structure; The figure is a cross-sectional view of a heat exchanger with a conventional structure. l: Module 2: Printed circuit board 3: Integrated circuit 4: Adhesive agent 5: Heat dissipation block 5a, 6d: Flat surface 6: Slit part 7: Screw hole 8: Water cooling jacket 9: Motherboard lO: Connector l: Holder 12: Screw 13 : Through hole 14: Water inlet [1 tube 15: Water 1 old 1 tube 20: Micro package
Claims (1)
集積回路実装面とは反対の面に固着剤にて固着され、か
つ固着面とは反対側の面が平坦面とされ、垂直な数本の
スリットが前記固着面及びその反対側面より互い違いに
刻入されてなるスリット部が設けられ、かつネジ穴を有
する平板状の放熱ブロックと、前記ネジ穴に対応した位
置に貫通穴を有し、該貫通穴にネジを通し、前記ネジ穴
に締め付けることにより、前記放熱ブロックの平坦面上
に重ねて取付けられ、該平坦面と接する面が平坦である
熱交換器とにより構成されることを特徴とする集積回路
の冷却構造。A substrate and an integrated circuit mounted on the substrate are fixed to the surface of the substrate opposite to the integrated circuit mounting surface with an adhesive, and the surface opposite to the fixed surface is a flat surface and is perpendicular. A flat heat dissipation block is provided with a slit portion in which several slits are cut alternately from the fixed surface and the opposite side thereof, and has a screw hole, and a through hole is provided at a position corresponding to the screw hole. and a heat exchanger that is mounted on the flat surface of the heat dissipation block by passing screws through the through holes and tightening them into the screw holes, and having a flat surface in contact with the flat surface. A cooling structure for an integrated circuit characterized by:
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25757285A JPS62118552A (en) | 1985-11-19 | 1985-11-19 | Cooling structure of integrated circuit |
DE8686308975T DE3666644D1 (en) | 1985-11-19 | 1986-11-18 | Liquid cooling system for integrated circuit chips |
US06/931,847 US4854377A (en) | 1985-11-19 | 1986-11-18 | Liquid cooling system for integrated circuit chips |
EP86308975A EP0225108B1 (en) | 1985-11-19 | 1986-11-18 | Liquid cooling system for integrated circuit chips |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25757285A JPS62118552A (en) | 1985-11-19 | 1985-11-19 | Cooling structure of integrated circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62118552A true JPS62118552A (en) | 1987-05-29 |
JPH0461506B2 JPH0461506B2 (en) | 1992-10-01 |
Family
ID=17308134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25757285A Granted JPS62118552A (en) | 1985-11-19 | 1985-11-19 | Cooling structure of integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62118552A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5636770A (en) * | 1994-06-13 | 1997-06-10 | Toyo Aerosol Industry Co. Ltd. | Aerosol dip tube |
EP2166569A1 (en) * | 2008-09-22 | 2010-03-24 | ABB Schweiz AG | Cooling device for a power component |
-
1985
- 1985-11-19 JP JP25757285A patent/JPS62118552A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5636770A (en) * | 1994-06-13 | 1997-06-10 | Toyo Aerosol Industry Co. Ltd. | Aerosol dip tube |
EP2166569A1 (en) * | 2008-09-22 | 2010-03-24 | ABB Schweiz AG | Cooling device for a power component |
Also Published As
Publication number | Publication date |
---|---|
JPH0461506B2 (en) | 1992-10-01 |
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