JPS62118519U - - Google Patents

Info

Publication number
JPS62118519U
JPS62118519U JP530186U JP530186U JPS62118519U JP S62118519 U JPS62118519 U JP S62118519U JP 530186 U JP530186 U JP 530186U JP 530186 U JP530186 U JP 530186U JP S62118519 U JPS62118519 U JP S62118519U
Authority
JP
Japan
Prior art keywords
photo
pressure oil
vapor pressure
low vapor
cvd apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP530186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342038Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP530186U priority Critical patent/JPH0342038Y2/ja
Publication of JPS62118519U publication Critical patent/JPS62118519U/ja
Application granted granted Critical
Publication of JPH0342038Y2 publication Critical patent/JPH0342038Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
JP530186U 1986-01-17 1986-01-17 Expired JPH0342038Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP530186U JPH0342038Y2 (en:Method) 1986-01-17 1986-01-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP530186U JPH0342038Y2 (en:Method) 1986-01-17 1986-01-17

Publications (2)

Publication Number Publication Date
JPS62118519U true JPS62118519U (en:Method) 1987-07-28
JPH0342038Y2 JPH0342038Y2 (en:Method) 1991-09-03

Family

ID=30786755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP530186U Expired JPH0342038Y2 (en:Method) 1986-01-17 1986-01-17

Country Status (1)

Country Link
JP (1) JPH0342038Y2 (en:Method)

Also Published As

Publication number Publication date
JPH0342038Y2 (en:Method) 1991-09-03

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