JPS62118443U - - Google Patents
Info
- Publication number
- JPS62118443U JPS62118443U JP668286U JP668286U JPS62118443U JP S62118443 U JPS62118443 U JP S62118443U JP 668286 U JP668286 U JP 668286U JP 668286 U JP668286 U JP 668286U JP S62118443 U JPS62118443 U JP S62118443U
- Authority
- JP
- Japan
- Prior art keywords
- collet
- semiconductor chip
- paste
- adsorbing
- replaceable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986006682U JPH0632685Y2 (ja) | 1986-01-20 | 1986-01-20 | コレツト |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986006682U JPH0632685Y2 (ja) | 1986-01-20 | 1986-01-20 | コレツト |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62118443U true JPS62118443U (US07582779-20090901-C00044.png) | 1987-07-28 |
JPH0632685Y2 JPH0632685Y2 (ja) | 1994-08-24 |
Family
ID=30789423
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986006682U Expired - Lifetime JPH0632685Y2 (ja) | 1986-01-20 | 1986-01-20 | コレツト |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0632685Y2 (US07582779-20090901-C00044.png) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04111735U (ja) * | 1991-03-19 | 1992-09-29 | 山形日本電気株式会社 | 半導体ダイボンデイング装置のダイ吸着コレツト |
JPH0566989U (ja) * | 1992-02-04 | 1993-09-03 | 株式会社東京精密 | プロービング装置用半導体ウエハステージ |
JP2009006441A (ja) * | 2007-06-27 | 2009-01-15 | Kyocera Corp | 真空ピンセットおよびこれを用いた基板搬送装置ならびに基板処理装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4913853U (US07582779-20090901-C00044.png) * | 1972-05-12 | 1974-02-05 | ||
JPS53127866U (US07582779-20090901-C00044.png) * | 1977-03-18 | 1978-10-11 | ||
JPS551105A (en) * | 1978-06-16 | 1980-01-07 | Hitachi Ltd | Jig for replacing chip of semiconductor device |
JPS5731148A (en) * | 1980-07-31 | 1982-02-19 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5788936U (US07582779-20090901-C00044.png) * | 1980-11-21 | 1982-06-01 |
-
1986
- 1986-01-20 JP JP1986006682U patent/JPH0632685Y2/ja not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4913853U (US07582779-20090901-C00044.png) * | 1972-05-12 | 1974-02-05 | ||
JPS53127866U (US07582779-20090901-C00044.png) * | 1977-03-18 | 1978-10-11 | ||
JPS551105A (en) * | 1978-06-16 | 1980-01-07 | Hitachi Ltd | Jig for replacing chip of semiconductor device |
JPS5731148A (en) * | 1980-07-31 | 1982-02-19 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5788936U (US07582779-20090901-C00044.png) * | 1980-11-21 | 1982-06-01 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04111735U (ja) * | 1991-03-19 | 1992-09-29 | 山形日本電気株式会社 | 半導体ダイボンデイング装置のダイ吸着コレツト |
JPH0566989U (ja) * | 1992-02-04 | 1993-09-03 | 株式会社東京精密 | プロービング装置用半導体ウエハステージ |
JP2009006441A (ja) * | 2007-06-27 | 2009-01-15 | Kyocera Corp | 真空ピンセットおよびこれを用いた基板搬送装置ならびに基板処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0632685Y2 (ja) | 1994-08-24 |