JPS62118429U - - Google Patents

Info

Publication number
JPS62118429U
JPS62118429U JP602286U JP602286U JPS62118429U JP S62118429 U JPS62118429 U JP S62118429U JP 602286 U JP602286 U JP 602286U JP 602286 U JP602286 U JP 602286U JP S62118429 U JPS62118429 U JP S62118429U
Authority
JP
Japan
Prior art keywords
plasma
magnetic field
chamber
pair
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP602286U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP602286U priority Critical patent/JPS62118429U/ja
Publication of JPS62118429U publication Critical patent/JPS62118429U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案装置の１実施例の概略構成図、
第２図は回転磁界の説明図である。 １…チヤンバ、２…リアクタ、５…プラズマ形
成手段、９…磁界形成手段、１０ａ〜１０ｃ…コ
イル、１１…電源。

Claims (1)

    【実用新案登録請求の範囲】
  1. チヤンバと、該チヤンバ内に対向配置されてい
    る一対のリアクタと、この一対のリアクタ間にプ
    ラズマを形成するプラズマ形成手段と、前記プラ
    ズマのプラズマ密度を増加させるため該プラズマ
    に回転磁界を付与する磁界形成手段とを備えてな
    るエツチング装置において、前記磁界発生手段は
    前記チヤンバに外装されているコイルと該コイル
    に上記回転磁界を発生させる電源とを備えてなる
    ことを特徴とするエツチング装置。
JP602286U 1986-01-20 1986-01-20 Pending JPS62118429U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP602286U JPS62118429U (ja) 1986-01-20 1986-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP602286U JPS62118429U (ja) 1986-01-20 1986-01-20

Publications (1)

Publication Number Publication Date
JPS62118429U true JPS62118429U (ja) 1987-07-28

Family

ID=30788146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP602286U Pending JPS62118429U (ja) 1986-01-20 1986-01-20

Country Status (1)

Country Link
JP (1) JPS62118429U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0312926A (ja) * 1989-06-12 1991-01-21 Nec Corp マグネトロン型エッチング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6186942A (ja) * 1984-10-03 1986-05-02 Anelva Corp 回転磁界を用いた放電反応装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6186942A (ja) * 1984-10-03 1986-05-02 Anelva Corp 回転磁界を用いた放電反応装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0312926A (ja) * 1989-06-12 1991-01-21 Nec Corp マグネトロン型エッチング装置

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