JPS62117506U - - Google Patents

Description

[Brief explanation of drawings]

Fig. 1 is a configuration diagram of a non-contact optical mirror curvature radius measuring device according to one embodiment of this invention, Fig. 2 is a schematic diagram for explaining the operation of this device, and Fig. 3 is another embodiment of this invention. Configuration diagram of an object showing an example, No. 4
The figure is a configuration diagram of a conventional non-contact optical mirror curvature radius measuring device. In the figure, 1 is an object, 2 is an irradiation light source, 3 is a mirror to be measured, 4 is a condenser lens, 5 is an image, 6 is a CCD linear image sensor, 7 is a signal processing circuit, and 8 is a synchroscope. Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

[Scope of utility model registration request] An optical object consisting of a scattering part and an object having a knife-edge-like boundary placed near the scattering part, a light source that irradiates this optical object, and irradiation with scattered light from the knife-edge region of the optical object. a mirror to be measured, an imaging optical system for collecting reflected light from the mirror and forming an image thereof, an optical sensor array for measuring a light intensity distribution in the vicinity of the imaging position, and this optical sensor. An optical mirror curvature radius measuring device consisting of a signal processing circuit that processes signals from an array.