JPS62116202A - 静電容量式変位検出器 - Google Patents
静電容量式変位検出器Info
- Publication number
- JPS62116202A JPS62116202A JP25628085A JP25628085A JPS62116202A JP S62116202 A JPS62116202 A JP S62116202A JP 25628085 A JP25628085 A JP 25628085A JP 25628085 A JP25628085 A JP 25628085A JP S62116202 A JPS62116202 A JP S62116202A
- Authority
- JP
- Japan
- Prior art keywords
- output
- electrode
- piston
- displacement
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 32
- 230000006698 induction Effects 0.000 claims description 9
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 7
- 239000011521 glass Substances 0.000 abstract description 6
- 230000002093 peripheral effect Effects 0.000 abstract description 4
- 238000007740 vapor deposition Methods 0.000 abstract 2
- 239000004020 conductor Substances 0.000 description 11
- 239000003990 capacitor Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000284 extract Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000010356 wave oscillation Effects 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25628085A JPS62116202A (ja) | 1985-11-15 | 1985-11-15 | 静電容量式変位検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25628085A JPS62116202A (ja) | 1985-11-15 | 1985-11-15 | 静電容量式変位検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62116202A true JPS62116202A (ja) | 1987-05-27 |
| JPH0451762B2 JPH0451762B2 (enrdf_load_stackoverflow) | 1992-08-20 |
Family
ID=17290450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25628085A Granted JPS62116202A (ja) | 1985-11-15 | 1985-11-15 | 静電容量式変位検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62116202A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6452616A (en) * | 1987-03-13 | 1989-02-28 | Sanyo Electric Co | Superconducting substance and production thereof |
| JPH01277717A (ja) * | 1988-04-18 | 1989-11-08 | Schutz Im & Exporthandl Bv | 容量変位メータ |
-
1985
- 1985-11-15 JP JP25628085A patent/JPS62116202A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6452616A (en) * | 1987-03-13 | 1989-02-28 | Sanyo Electric Co | Superconducting substance and production thereof |
| JPH01277717A (ja) * | 1988-04-18 | 1989-11-08 | Schutz Im & Exporthandl Bv | 容量変位メータ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0451762B2 (enrdf_load_stackoverflow) | 1992-08-20 |
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