JPS621152A - Photomagnetic recording medium - Google Patents

Photomagnetic recording medium

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Publication number
JPS621152A
JPS621152A JP13977085A JP13977085A JPS621152A JP S621152 A JPS621152 A JP S621152A JP 13977085 A JP13977085 A JP 13977085A JP 13977085 A JP13977085 A JP 13977085A JP S621152 A JPS621152 A JP S621152A
Authority
JP
Japan
Prior art keywords
film
magnetic film
recording medium
magnetic
rare earth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13977085A
Other languages
Japanese (ja)
Inventor
Motoharu Tanaka
元治 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP13977085A priority Critical patent/JPS621152A/en
Publication of JPS621152A publication Critical patent/JPS621152A/en
Pending legal-status Critical Current

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  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To obtain a photomagnetic recording medium which increases the Kerr rotating angle and has a good reproduction characteristic by adding at least 1 atom% of Pm, Eu, Ho or Er to a magnetic film consisting of an amor phous rare earth-transition metal. CONSTITUTION:The magnetic film 13 and protective film 15 are laminated on a substrate 11. The film 13 consists of the amorphous alloy film of the rare earth metal-transition metal contg. Pm, Eu, Ho or Er and is formed on the substrate 11 by a sputtering method, vapor deposition method, ion plating method, etc. More preferably, the magnetic film has the compsn. expressed by the formula M1-x(R1-yAy)x, where M is at least one kind of element of Fe and Co, R is at least one kind of element of Sm, Gd, Tb and Dy, A is at least one kind of element of Pm, Eu, Ho and Er, x: 0.1<=x<=0.4 y: 0.02<y<=0.3. The excellent vertical anisotropy and coercive force are thus obtd.

Description

【発明の詳細な説明】 技帆立夏 本発明は、ドキュメントファイル、フロッピーディスク
、ハードディスクなどに使用される光磁気記録媒体に関
する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magneto-optical recording medium used for document files, floppy disks, hard disks, etc.

災來勿技宜 近年、光の熱効果などを利用して磁性薄膜に磁区を書込
んで情報を記録し、磁気光学効果を利用して情報を読み
出すようにした光磁気記録媒体が注目されている。
In recent years, magneto-optical recording media have attracted attention, in which information is recorded by writing magnetic domains on a magnetic thin film using the thermal effect of light, and information is read out using the magneto-optical effect. There is.

従来、光磁気記録媒体に用いられる記録層としては、T
b−Fe合金のような希土類−遷移金属系アモルファス
磁性体からなる薄膜が知られている(特公昭57−20
691)、このような光磁気記録媒体への情報の記録は
、磁性体のキュー、り温度または補償温度における保磁
力の急激な変化特性を利用して実施され、具体的には2
値信号で変調されたレーザー光を垂直磁化された磁性薄
膜に照射、加熱して磁化の向きを反転させることにより
行われる。また、再生は、反転記録された磁性膜の磁気
光学効果の差を利用して行われる。
Conventionally, the recording layer used in magneto-optical recording media is T.
Thin films made of rare earth-transition metal-based amorphous magnetic materials such as b-Fe alloys are known (Japanese Patent Publication No. 57-20
691), the recording of information on such magneto-optical recording media is carried out by utilizing the rapid change characteristics of the coercive force at the cue, temperature or compensation temperature of the magnetic material.
This is done by irradiating a perpendicularly magnetized magnetic thin film with a laser beam modulated by a value signal, heating it, and reversing the direction of magnetization. Further, reproduction is performed by utilizing the difference in the magneto-optical effect of the magnetic film subjected to inversion recording.

希土類−遷移金属アモルファス磁性体薄膜は、垂直磁気
異方性を示し、保磁力Hcが大きくメモリ材料に適して
いるが、カー回転角θkが約0゜18degと小さく、
再生感度の点でよりいっそうの改善がまたれていた。
A rare earth-transition metal amorphous magnetic thin film exhibits perpendicular magnetic anisotropy and has a large coercive force Hc, making it suitable for memory materials, but the Kerr rotation angle θk is small at about 0°18°.
There was even more improvement in playback sensitivity.

見豆段且煎 本発明は、磁気光学特性の優れた希土類−遷移金属系ア
モルファス磁性体を用いた光記録媒体を提供するもので
ある。
The present invention provides an optical recording medium using a rare earth-transition metal amorphous magnetic material with excellent magneto-optical properties.

災1J11支 本・発明の光磁気記録媒体は、垂直磁気異方性を有する
希土類−遷移金属系アモルファス磁性膜を設けた光磁気
記録媒体において、該磁性膜が少なくともIM子%のP
m、Eu、HoまたはErを含むことを特徴とする。
A magneto-optical recording medium of the present invention is a magneto-optical recording medium provided with a rare earth-transition metal based amorphous magnetic film having perpendicular magnetic anisotropy, wherein the magnetic film has a P content of at least IM%.
It is characterized by containing m, Eu, Ho or Er.

以下、本発明についてさらに詳細に説明する。The present invention will be explained in more detail below.

第1図は、本発明の光磁気記録媒体の構成例を示す断面
図であり、基板11上に磁性膜13および保護膜15が
積層されている。磁性膜13は。
FIG. 1 is a cross-sectional view showing an example of the configuration of a magneto-optical recording medium of the present invention, in which a magnetic film 13 and a protective film 15 are laminated on a substrate 11. As shown in FIG. The magnetic film 13 is.

Pm(プロメチウム)、Eu(ユーロピウム)、Ho 
(ホルミウム)またはEr(エルビウム)を含む希土類
金属−遷移金属°の非晶質合金膜からなり、スパッタ法
、蒸着法、イオンブレーティング法などにより基板11
上に形成される。希土類金属としてはSm(サマリウム
)、Gd(ガドリニウム)、Tb(テルビウム)、Dy
(ジスプロシウム)などが挙げられ、また、遷移金属と
してはFe(鉄)、Go(コバルト)などが例示される
。好ましくは、磁性膜は次の一般式(1)で示される組
成を有する。
Pm (promethium), Eu (europium), Ho
The substrate 11 is made of an amorphous alloy film of rare earth metals and transition metals containing (holmium) or Er (erbium).
formed on top. Rare earth metals include Sm (samarium), Gd (gadolinium), Tb (terbium), Dy
(dysprosium), and examples of transition metals include Fe (iron) and Go (cobalt). Preferably, the magnetic film has a composition represented by the following general formula (1).

Ml−X(R1−YAY)X           (
1)(式中、M、R,A、x、yはそれぞれ次のものを
表わす。
Ml-X(R1-YAY)X (
1) (In the formula, M, R, A, x, and y each represent the following.

M:Fe、Goのうち少なくとも1種の元素R: Sm
、Gd、Tb、Dyのうち少なくとも1種の元素 A : Pm、Eu、Ha、E rのうち少なくとも1
種の元素 x:o、1≦X≦0.4 y : 0.02< y≦0.3) Xおよびyを上記範囲とすることにより、優れた垂直異
方性と保磁力が得られる。置換数yの好ましい範囲は0
.05≦y≦0.15である。
M: At least one element among Fe and Go R: Sm
, Gd, Tb, Dy: at least one element A: at least one element among Pm, Eu, Ha, Er;
Seed element x: o, 1≦X≦0.4 y: 0.02<y≦0.3) By setting X and y within the above ranges, excellent perpendicular anisotropy and coercive force can be obtained. The preferred range of the number of substitutions y is 0
.. 05≦y≦0.15.

磁性膜13の膜厚は0,03〜0.5μ薦程度が適当で
ある。
The appropriate thickness of the magnetic film 13 is approximately 0.03 to 0.5 μm.

保護膜15は、アモルファス磁性体が酸素や水により酸
化腐食されるのを防止するためのものであり、Sin、
、Sin、Si、N、、AINなどからなる。保護膜は
蒸着法、スパッタ法。
The protective film 15 is for preventing the amorphous magnetic material from being oxidized and corroded by oxygen or water.
, Sin, Si, N, , AIN, etc. The protective film is formed by vapor deposition or sputtering.

イオンブレーティング法などにより形成することができ
る。保護膜の厚さは0.05〜1μm程度が好適である
It can be formed by an ion blating method or the like. The thickness of the protective film is preferably about 0.05 to 1 μm.

基板11としては非磁性材料が用いられ、たとえば、ガ
ラス、プラスチック、セラミックなどの透明基板あるい
は不透明基板が用いられる。
A nonmagnetic material is used as the substrate 11, and for example, a transparent substrate or an opaque substrate such as glass, plastic, or ceramic is used.

第2図は、本発明のさらに他の実施例を示し。FIG. 2 shows yet another embodiment of the invention.

磁性膜13をはさむ形で保護膜15.17を設け、磁性
膜の安定性をよりいっそう改善したものである。
Protective films 15 and 17 are provided to sandwich the magnetic film 13, thereby further improving the stability of the magnetic film.

また、磁性膜の上部に断熱膜や反射膜を設けることもで
きる。
Furthermore, a heat insulating film or a reflective film can be provided on top of the magnetic film.

月IIυ碩1 本発明によれば、アモルファス希土類−遷移金属系磁性
膜に少なくとも1原子%のPm、Eu。
According to the present invention, the amorphous rare earth-transition metal based magnetic film contains at least 1 atomic % of Pm and Eu.

HaまたはErを添加することにより、カー回転角ok
が大きくなり、再生特性のよい光磁気記録媒体が得られ
る。
Kerr rotation angle can be increased by adding Ha or Er.
becomes large, and a magneto-optical recording medium with good reproduction characteristics can be obtained.

実施例1 2元マグネトロンスパッタ装置を用い、 Pmのチップ
(IQa+m X 10a+a+ X 1 +am”)
を150+amφ、 3 vsrs”のTbターゲット
の上にのせ、 F ea、、、Co、、の合金ターゲッ
ト(150+*mφ、3mm”)と同時に以下の条件で
スパッタして、回転している基板の上に磁性膜を作成し
た。ここで、Pmのチップ数を調整して、Tbの一部を
Pm置換することにより、磁性膜のPm置換量を制御し
た。
Example 1 Using a binary magnetron sputtering device, a Pm chip (IQa+m X 10a+a+X 1 +am")
was placed on a Tb target of 150+amφ, 3 vsrs", and simultaneously sputtered with an alloy target (150+*mφ, 3mm") of Fea, Co, under the following conditions, and sputtered on a rotating substrate. A magnetic film was created. Here, the amount of Pm substitution in the magnetic film was controlled by adjusting the number of Pm chips and substituting a part of Tb with Pm.

得られた磁性膜は、基板側からHe−Neレーザ(λ=
633nm)を照射し、対称角振動法によりカー回転角
θkを求め、Pmの置換数yとθにとの関係を調べ第3
図に示した。
The obtained magnetic film was exposed to a He-Ne laser (λ=
633 nm), the Kerr rotation angle θk was determined by the symmetrical angular vibration method, and the relationship between the substitution number y of Pm and θ was investigated.
Shown in the figure.

孟Uの4」記」軒− 残留ガス圧: I Xl0−@TorrArガス圧: 
5 Xl0−3Torrターゲット材: Fe、、、C
ol1.、、Tb+Pm放電電カニ 400W(F e
、、、Cofi、□)、100W(T b+Pm) スパッタ時間: 15m1n (膜厚1000人)基板
ニスライドガラス 基板回転: 30rpm 実施例2 Tbの一部をEuで置換して、磁性膜組成を変化させて
、Euの置換数yとカー回転角θにとの関係を調べ第4
図に示した。磁性膜の作成条件は、ターゲットを除いて
実施例1と全て同じである。
Meng U's 4th Note - Residual gas pressure: I Xl0 - @TorrAr gas pressure:
5 Xl0-3Torr target material: Fe,...,C
ol1. ,,Tb+Pm discharge electric crab 400W (F e
,,,Cofi, □), 100W (T b + Pm) Sputtering time: 15m1n (film thickness 1000 people) Substrate nickel glass substrate rotation: 30 rpm Example 2 Part of Tb was replaced with Eu to change the magnetic film composition The relationship between the number of Eu substitutions y and the Kerr rotation angle θ is investigated and
Shown in the figure. The conditions for forming the magnetic film were all the same as in Example 1 except for the target.

ターゲット材: F e、、、G o。0. T b 
+E u実施例3 Tbの一部をHOで置換して、磁性膜組成を変化させて
、Hoの置換数yとカー回転角θにとの関係を調べ第4
図に示した。磁性膜の作成条件は、ターゲットを除いて
実施例1と全て同じである。
Target material: F e,,,G o. 0. Tb
+E u Example 3 Part of Tb was replaced with HO to change the magnetic film composition, and the relationship between the number of Ho substitutions y and the Kerr rotation angle θ was investigated.
Shown in the figure. The conditions for forming the magnetic film were all the same as in Example 1 except for the target.

ターゲット材: F elL、G o。、、、 T b
 +H。
Target material: FelL, Go. ,,, T b
+H.

実施例4 Tbの一部をErで置換して、磁性膜組成を変化させて
、Erの置換数yとカー回転角θにとの関係を調べ第4
図に示した6磁性膜の作成条件は、ターゲットを除いて
実施例1と全て同じである。
Example 4 Part of Tb was replaced with Er to change the magnetic film composition, and the relationship between the Er substitution number y and the Kerr rotation angle θ was investigated.
The conditions for producing the six magnetic films shown in the figure are all the same as in Example 1 except for the target.

ターゲット材: F eo、sCOnl、 T b +
E r第3図〜第6図より、Pm、Eu、HoまたはE
rを添加することにより、カー回転角が約0.02〜0
 、04deg大きくなり再生特性が改善されることが
判る。
Target material: F eo, sCONl, T b +
E rFrom Figures 3 to 6, Pm, Eu, Ho or E
By adding r, the Kerr rotation angle is approximately 0.02 to 0.
, 04 degrees, and it can be seen that the reproduction characteristics are improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図は、本発明の実施例を示す断面図で
ある。 第3図、第4図、第5図および第6図は、それぞれ磁性
膜中のPm、、Eu、Ho、Erの置換数yとカー回転
角θにとの関係を示すグラフである。 11・・・基    板   I3・・・磁 性 膜1
5.17・・・保護膜 毘l聞 剤3図 (Fe0.9COO,l)0.79(Tk)I−yPm
、)H21中ny陥2聞 鷺4閉 (R10,gco□、1)0.7g(Tol−yEuy
)α21中のY手続補正書    “ 昭和60年10月17日 1、事件の表示 昭和60年特許願第139770号 2、発明の名称 光磁気記録媒体 3、補正をする者 事件との関係  特許出願人 東京都大田区中馬込1丁目3番6号 一番町フェニックスビル 明細書の[発明の詳細な説明」の欄 i、補正の内容 (1)明細書第4頁11行に、ry :Q、02<y≦
0.3」とあルノヲ、fy:o、02≦y≦0.3Jl
 ニ訂正する。 以上
1 and 2 are cross-sectional views showing embodiments of the present invention. FIGS. 3, 4, 5, and 6 are graphs showing the relationship between the number of substitutions y of Pm, Eu, Ho, and Er in the magnetic film and the Kerr rotation angle θ, respectively. 11...Substrate I3...Magnetic film 1
5.17...Protective film agent 3 (Fe0.9COO,l)0.79(Tk)I-yPm
,) H21 middle ny fall 2 Monsagi 4 closing (R10, gco□, 1) 0.7g (Tol-yEuy
) Y procedural amendment in α21 “October 17, 1985 1, Display of the case 1985 Patent Application No. 139770 2, Name of the invention magneto-optical recording medium 3, Person making the amendment Relationship to the case Patent application Ichibancho Phoenix Building, 1-3-6 Nakamagome, Ota-ku, Tokyo Contents of the amendment in column i of the [Detailed Description of the Invention] of the specification (1) On page 4, line 11 of the specification, ry:Q ,02<y≦
0.3'' and Arunwo, fy:o, 02≦y≦0.3Jl
D. Correct. that's all

Claims (1)

【特許請求の範囲】[Claims] 1、垂直磁気異方性を有する希土類−遷移金属系アモル
ファス磁性膜を設けた光磁気記録媒体において、該磁性
膜が少なくとも1原子%のPm、Eu、HoまたはEr
を含むことを特徴とする光磁気記録媒体。
1. In a magneto-optical recording medium provided with a rare earth-transition metal-based amorphous magnetic film having perpendicular magnetic anisotropy, the magnetic film contains at least 1 atomic % of Pm, Eu, Ho, or Er.
A magneto-optical recording medium comprising:
JP13977085A 1985-06-26 1985-06-26 Photomagnetic recording medium Pending JPS621152A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13977085A JPS621152A (en) 1985-06-26 1985-06-26 Photomagnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13977085A JPS621152A (en) 1985-06-26 1985-06-26 Photomagnetic recording medium

Publications (1)

Publication Number Publication Date
JPS621152A true JPS621152A (en) 1987-01-07

Family

ID=15252995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13977085A Pending JPS621152A (en) 1985-06-26 1985-06-26 Photomagnetic recording medium

Country Status (1)

Country Link
JP (1) JPS621152A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03113852A (en) * 1989-09-28 1991-05-15 Sanyo Electric Co Ltd Magneto-optical recording medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03113852A (en) * 1989-09-28 1991-05-15 Sanyo Electric Co Ltd Magneto-optical recording medium

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