JPS62114439U - - Google Patents

Info

Publication number
JPS62114439U
JPS62114439U JP149886U JP149886U JPS62114439U JP S62114439 U JPS62114439 U JP S62114439U JP 149886 U JP149886 U JP 149886U JP 149886 U JP149886 U JP 149886U JP S62114439 U JPS62114439 U JP S62114439U
Authority
JP
Japan
Prior art keywords
electron beam
aperture
rays
mask
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP149886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322905Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986001498U priority Critical patent/JPH0322905Y2/ja
Publication of JPS62114439U publication Critical patent/JPS62114439U/ja
Application granted granted Critical
Publication of JPH0322905Y2 publication Critical patent/JPH0322905Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • X-Ray Techniques (AREA)
JP1986001498U 1986-01-08 1986-01-08 Expired JPH0322905Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986001498U JPH0322905Y2 (enExample) 1986-01-08 1986-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986001498U JPH0322905Y2 (enExample) 1986-01-08 1986-01-08

Publications (2)

Publication Number Publication Date
JPS62114439U true JPS62114439U (enExample) 1987-07-21
JPH0322905Y2 JPH0322905Y2 (enExample) 1991-05-20

Family

ID=30779459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986001498U Expired JPH0322905Y2 (enExample) 1986-01-08 1986-01-08

Country Status (1)

Country Link
JP (1) JPH0322905Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62155516A (ja) * 1985-12-27 1987-07-10 Mitsubishi Electric Corp Ｘ線露光装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62155516A (ja) * 1985-12-27 1987-07-10 Mitsubishi Electric Corp Ｘ線露光装置

Also Published As

Publication number Publication date
JPH0322905Y2 (enExample) 1991-05-20

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