JPS62114439U - - Google Patents

Info

Publication number
JPS62114439U
JPS62114439U JP149886U JP149886U JPS62114439U JP S62114439 U JPS62114439 U JP S62114439U JP 149886 U JP149886 U JP 149886U JP 149886 U JP149886 U JP 149886U JP S62114439 U JPS62114439 U JP S62114439U
Authority
JP
Japan
Prior art keywords
electron beam
aperture
rays
mask
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP149886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322905Y2 (US20020128544A1-20020912-P00008.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986001498U priority Critical patent/JPH0322905Y2/ja
Publication of JPS62114439U publication Critical patent/JPS62114439U/ja
Application granted granted Critical
Publication of JPH0322905Y2 publication Critical patent/JPH0322905Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • X-Ray Techniques (AREA)
JP1986001498U 1986-01-08 1986-01-08 Expired JPH0322905Y2 (US20020128544A1-20020912-P00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986001498U JPH0322905Y2 (US20020128544A1-20020912-P00008.png) 1986-01-08 1986-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986001498U JPH0322905Y2 (US20020128544A1-20020912-P00008.png) 1986-01-08 1986-01-08

Publications (2)

Publication Number Publication Date
JPS62114439U true JPS62114439U (US20020128544A1-20020912-P00008.png) 1987-07-21
JPH0322905Y2 JPH0322905Y2 (US20020128544A1-20020912-P00008.png) 1991-05-20

Family

ID=30779459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986001498U Expired JPH0322905Y2 (US20020128544A1-20020912-P00008.png) 1986-01-08 1986-01-08

Country Status (1)

Country Link
JP (1) JPH0322905Y2 (US20020128544A1-20020912-P00008.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62155516A (ja) * 1985-12-27 1987-07-10 Mitsubishi Electric Corp Ｘ線露光装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62155516A (ja) * 1985-12-27 1987-07-10 Mitsubishi Electric Corp Ｘ線露光装置

Also Published As

Publication number Publication date
JPH0322905Y2 (US20020128544A1-20020912-P00008.png) 1991-05-20

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