JPS62113031A - レ−ザパワ−測定方法 - Google Patents

レ−ザパワ−測定方法

Info

Publication number
JPS62113031A
JPS62113031A JP25288485A JP25288485A JPS62113031A JP S62113031 A JPS62113031 A JP S62113031A JP 25288485 A JP25288485 A JP 25288485A JP 25288485 A JP25288485 A JP 25288485A JP S62113031 A JPS62113031 A JP S62113031A
Authority
JP
Japan
Prior art keywords
laser beam
measured
semiconductor substrate
measurement control
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25288485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0458890B2 (enExample
Inventor
Hideo Masuda
増田　秀男
Kazuo Matsumoto
和夫 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPC Electronics Corp
Original Assignee
SPC Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SPC Electronics Corp filed Critical SPC Electronics Corp
Priority to JP25288485A priority Critical patent/JPS62113031A/ja
Publication of JPS62113031A publication Critical patent/JPS62113031A/ja
Publication of JPH0458890B2 publication Critical patent/JPH0458890B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP25288485A 1985-11-13 1985-11-13 レ−ザパワ−測定方法 Granted JPS62113031A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25288485A JPS62113031A (ja) 1985-11-13 1985-11-13 レ−ザパワ−測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25288485A JPS62113031A (ja) 1985-11-13 1985-11-13 レ−ザパワ−測定方法

Publications (2)

Publication Number Publication Date
JPS62113031A true JPS62113031A (ja) 1987-05-23
JPH0458890B2 JPH0458890B2 (enExample) 1992-09-18

Family

ID=17243499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25288485A Granted JPS62113031A (ja) 1985-11-13 1985-11-13 レ−ザパワ−測定方法

Country Status (1)

Country Link
JP (1) JPS62113031A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610827U (ja) * 1992-07-09 1994-02-10 株式会社自由電子レーザ研究所 レーザ光および電子ビームの検出器
BE1007005A3 (nl) * 1993-04-16 1995-02-14 Vito Inrichting voor het bepalen van het vermogen van een energieflux.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610827U (ja) * 1992-07-09 1994-02-10 株式会社自由電子レーザ研究所 レーザ光および電子ビームの検出器
BE1007005A3 (nl) * 1993-04-16 1995-02-14 Vito Inrichting voor het bepalen van het vermogen van een energieflux.

Also Published As

Publication number Publication date
JPH0458890B2 (enExample) 1992-09-18

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