JPS6211174U - - Google Patents

Info

Publication number
JPS6211174U
JPS6211174U JP10288785U JP10288785U JPS6211174U JP S6211174 U JPS6211174 U JP S6211174U JP 10288785 U JP10288785 U JP 10288785U JP 10288785 U JP10288785 U JP 10288785U JP S6211174 U JPS6211174 U JP S6211174U
Authority
JP
Japan
Prior art keywords
liquid nitrogen
trap
valve
plasma cvd
monitoring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10288785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0111720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10288785U priority Critical patent/JPH0111720Y2/ja
Publication of JPS6211174U publication Critical patent/JPS6211174U/ja
Application granted granted Critical
Publication of JPH0111720Y2 publication Critical patent/JPH0111720Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP10288785U 1985-07-08 1985-07-08 Expired JPH0111720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10288785U JPH0111720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-07-08 1985-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10288785U JPH0111720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-07-08 1985-07-08

Publications (2)

Publication Number Publication Date
JPS6211174U true JPS6211174U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-23
JPH0111720Y2 JPH0111720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-06

Family

ID=30974938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10288785U Expired JPH0111720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-07-08 1985-07-08

Country Status (1)

Country Link
JP (1) JPH0111720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0111720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-06

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