JPS6211172U - - Google Patents
Info
- Publication number
- JPS6211172U JPS6211172U JP10044185U JP10044185U JPS6211172U JP S6211172 U JPS6211172 U JP S6211172U JP 10044185 U JP10044185 U JP 10044185U JP 10044185 U JP10044185 U JP 10044185U JP S6211172 U JPS6211172 U JP S6211172U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- shutter
- vacuum
- fixed plate
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10044185U JPH0143398Y2 (enExample) | 1985-07-03 | 1985-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10044185U JPH0143398Y2 (enExample) | 1985-07-03 | 1985-07-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6211172U true JPS6211172U (enExample) | 1987-01-23 |
| JPH0143398Y2 JPH0143398Y2 (enExample) | 1989-12-15 |
Family
ID=30970266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10044185U Expired JPH0143398Y2 (enExample) | 1985-07-03 | 1985-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0143398Y2 (enExample) |
-
1985
- 1985-07-03 JP JP10044185U patent/JPH0143398Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0143398Y2 (enExample) | 1989-12-15 |
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