JPS62108730U - - Google Patents
Info
- Publication number
- JPS62108730U JPS62108730U JP20053385U JP20053385U JPS62108730U JP S62108730 U JPS62108730 U JP S62108730U JP 20053385 U JP20053385 U JP 20053385U JP 20053385 U JP20053385 U JP 20053385U JP S62108730 U JPS62108730 U JP S62108730U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- local
- work areas
- clean
- local work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000428 dust Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Description
第１図は本考案に係る物品製造装置の一実施例
を示すクリーンルーム概略側断面図、第２図乃至
第４図は第１図の装置におけるクリーンユニツト
パネルの具体的三例を説明するための各拡大断面
図である。第５図はクリーンルームを使つた物品
製造装置の概略側断面図、第６図及び第７図は第
５図の装置を改良した二例を示す部分側断面図で
ある。
１…クリーンルーム、７…クリーンエアー、Ｍ
…局所作業領域、Ｎ…局所発塵源、１６，１６ａ
，１６ｂ，１６ｃ…クリーンユニツトパネル、１
７…吸気面、１８…排気面、２０，２５，３１…
エアーフイルタ。
FIG. 1 is a schematic side sectional view of a clean room showing one embodiment of the article manufacturing apparatus according to the present invention, and FIGS. 2 to 4 are diagrams for explaining three specific examples of the clean unit panel in the apparatus of FIG. 1. FIG. 3 is an enlarged cross-sectional view. FIG. 5 is a schematic side sectional view of an article manufacturing apparatus using a clean room, and FIGS. 6 and 7 are partial side sectional views showing two improved examples of the apparatus of FIG. 5. 1...Clean room, 7...Clean air, M
...Local working area, N...Local dust source, 16, 16a
, 16b, 16c...Clean unit panel, 1
7...Intake surface, 18...Exhaust surface, 20, 25, 31...
air filter.
Claims (1)
、物品の製造や搬送を行うものにおいて、 クリーンルーム内の各種設備における物品処理
の局所作業領域と、この局所作業領域に近い位置
にあるメカニカルな可動部分である局所発塵源と
の間に、局所発塵源側から吸気する吸気面、及び
局所作業領域に向けエアーフイルタを介して排気
する排気面を両面に有する薄型のクリーンユニツ
トパネルを配置したことを特徴とする物品製造装
置。[Scope of Utility Model Registration Claim] For products that are manufactured or transported in a clean room maintained in a clean air atmosphere, local work areas for product processing in various equipment within the clean room and locations near these local work areas. Between the local dust source, which is a mechanically movable part located in An article manufacturing device characterized by having a unit panel arranged therein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20053385U JPS62108730U (en) | 1985-12-26 | 1985-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20053385U JPS62108730U (en) | 1985-12-26 | 1985-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62108730U true JPS62108730U (en) | 1987-07-11 |
Family
ID=31163127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20053385U Pending JPS62108730U (en) | 1985-12-26 | 1985-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62108730U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017161103A (en) * | 2016-03-07 | 2017-09-14 | トヨタ自動車株式会社 | Air purification system |
-
1985
- 1985-12-26 JP JP20053385U patent/JPS62108730U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017161103A (en) * | 2016-03-07 | 2017-09-14 | トヨタ自動車株式会社 | Air purification system |
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