JPS6277743U

JPS6277743U -

Info

Publication number: JPS6277743U
Application number: JP16902385U
Authority: JP
Priority date: 1985-11-01
Filing date: 1985-11-01
Publication date: 1987-05-18

Description

[Brief explanation of the drawing]

第１図および第３図ないし第７図は本考案の実
施例を示し、第２図は従来装置を示す。第１図、
第２図はユニツト本体の一部破断斜視図、第３図
はクリーンベンチの概略的側面図、第４図はクリ
ーンラインの一部を示す概略的斜視図、第５図は
クリーンブースの概略的斜視図、第６図はクリー
ントンネルの一部を示す概略的斜視図、第７図は
クリーンルームの概略的斜視図である。Ａ……ユニツト本体、１，２……パネル（側壁
）、４……排気口、６……吸気口、８……ヘパフ
イルタ、１４……鉛直ダクト、１６……テーブル
、１８……Ｌ字状のダクト、１９……水平ダクト
。 1 and 3 to 7 show an embodiment of the present invention, and FIG. 2 shows a conventional device. Figure 1,
Fig. 2 is a partially cutaway perspective view of the unit main body, Fig. 3 is a schematic side view of the clean bench, Fig. 4 is a schematic perspective view showing part of the clean line, and Fig. 5 is a schematic diagram of the clean booth. FIG. 6 is a schematic perspective view showing a part of the clean tunnel, and FIG. 7 is a schematic perspective view of the clean room. A... Unit body, 1, 2... Panel (side wall), 4... Exhaust port, 6... Intake port, 8... Hepa filter, 14... Vertical duct, 16... Table, 18... L-shape duct, 19...horizontal duct.

Claims

[Claims for Utility Model Registration] 1. An intake port is provided at the bottom of the side wall of the unit body, and an exhaust port is provided at the top for exhausting air in a direction parallel to the wall surface of the side wall. A dust removal unit with a dust removal device built into the airflow passage leading to the exhaust port. 2 The length from the top end to the bottom end of the unit body is
Scope of claim for utility model registration: 150cm or less
The dust removal unit described in section. 3. The dust removal unit according to claim 1 or 2, wherein the length from the upper end of the unit main body to the upper edge of the intake port is 120 cm or less. 4. Any of the claims 1 to 3 of the utility model registration claim, in which a horizontal duct for directing exhaust air in a direction perpendicular to the side wall of the unit body is removably attached to the exhaust port. The dust removal unit described in 5. A utility model registered in any one of claims 1 to 3, in which a vertical duct for directing exhaust air in a direction parallel to the wall surface of the side wall of the unit main body is removably attached to the exhaust port. The dust removal unit listed. 6. The dust removal unit according to claim 5, wherein the thickness of the duct is thinner than or equal to the thickness of the unit body. 7. According to claim 6 of the utility model registration, a base end edge of a table extending in a direction perpendicular to the side wall is removably attached to a part of the upper end surface of the unit main body. dust removal unit.