JPS6428928U - - Google Patents
Info
- Publication number
- JPS6428928U JPS6428928U JP12306087U JP12306087U JPS6428928U JP S6428928 U JPS6428928 U JP S6428928U JP 12306087 U JP12306087 U JP 12306087U JP 12306087 U JP12306087 U JP 12306087U JP S6428928 U JPS6428928 U JP S6428928U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- horizontal
- filter unit
- casing
- closed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
第１図は本考案に従がうフイルタユニツトによ
つて自由空間内に高清浄域を形成するための基本
原理を示す気流パターン図、第２図は第１図の原
理によつてクリーンルーム内の搬送通路を高清浄
域に形成する状態を平面的に示した概念図、第３
図は本考案に従うフイルタユニツトの代表的な全
体形状を示す透視斜視図、第４図は第３図のフイ
ルタユニツトを連設した状態を示す斜視図、第５
図は本考案に従うフイルタユニツトの他の例を示
す透視斜視図、第６図は本考案のフイルタユニツ
トのＨＥＰＡフイルタの傾斜部分の他の例を説明
するための部分略断面図である。
１……天井面、２……床面、３……自由空間、
４……高清浄域、５……フイルタユニツト、６…
…ケーシング、７……ＨＥＰＡフイルタの水平部
分、８……ＨＥＰＡフイルタの傾斜部分、９……
給気プレナム、１０……フアン、１１……一次フ
イルタ、１２……搬送通路。
Figure 1 is an airflow pattern diagram showing the basic principle for forming a highly clean area in free space using a filter unit according to the present invention, and Figure 2 is an airflow pattern diagram showing the basic principle for forming a highly clean area in a free space using the filter unit according to the present invention. Conceptual diagram showing a state in which a conveyance path is formed in a highly clean area, Part 3
The figure is a perspective view showing a typical overall shape of the filter unit according to the present invention, FIG. 4 is a perspective view showing the filter unit of FIG.
The figure is a perspective view showing another example of the filter unit according to the present invention, and FIG. 6 is a partial schematic sectional view for explaining another example of the inclined portion of the HEPA filter of the filter unit according to the present invention. 1... Ceiling surface, 2... Floor surface, 3... Free space,
4...High cleanliness area, 5...Filter unit, 6...
...Casing, 7... Horizontal part of HEPA filter, 8... Inclined part of HEPA filter, 9...
Supply air plenum, 10... fan, 11... primary filter, 12... conveyance passage.
Claims (1)
ーシングの該開口に張り渡されたＨＥＰＡフイル
タ層とからなるフイルタユニツトにおいて、該Ｈ
ＥＰＡフイルタ層が、該開口の水平面に対して平
行な水平部分と該水平面に対して傾斜した傾斜部
分とから構成され、該開口の中央部は該水平部分
によつて塞がれると共に、該傾斜部分が前記開口
の少なくとも一方の縁から中央部の方向に向けて
下さがりの傾斜を有し、そして、この傾斜部分と
水平部分とが互いに連結されていることを特徴と
する、クリーンルーム自由空間内に高清浄域を形
成するためのフイルタユニツト。 In a filter unit consisting of a casing having a rectangular opening on the lower surface and a HEPA filter layer stretched across the opening of the casing, the H
The EPA filter layer is composed of a horizontal part parallel to the horizontal plane of the opening and an inclined part inclined with respect to the horizontal plane, and the central part of the opening is closed by the horizontal part, and the inclined part is closed by the horizontal part. In a clean room free space, the portion has a downward slope from at least one edge of the opening toward the center, and the sloped portion and the horizontal portion are connected to each other. A filter unit to create a highly clean area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987123060U JPH0437614Y2 (en) | 1987-08-11 | 1987-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987123060U JPH0437614Y2 (en) | 1987-08-11 | 1987-08-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6428928U true JPS6428928U (en) | 1989-02-21 |
| JPH0437614Y2 JPH0437614Y2 (en) | 1992-09-03 |
Family
ID=31371569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987123060U Expired JPH0437614Y2 (en) | 1987-08-11 | 1987-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437614Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7297050B2 (en) | 2001-05-14 | 2007-11-20 | Acanthe | Method and device for diffusing a protective flux with regard to a surrounding environment |
| JP2011226770A (en) * | 2010-03-29 | 2011-11-10 | Shimizu Corp | Air conditioning system |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57199026U (en) * | 1981-06-10 | 1982-12-17 | ||
| JPS5918230U (en) * | 1982-07-28 | 1984-02-03 | 富士電機株式会社 | Air diffusion type high performance filter |
| JPS6020050A (en) * | 1983-07-15 | 1985-02-01 | Matsushita Electric Ind Co Ltd | Device to mix water with hot-water |
| JPS6161011U (en) * | 1984-09-27 | 1986-04-24 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918230B2 (en) * | 1976-10-29 | 1984-04-26 | 東芝テック株式会社 | Serial printer - drive unit |
| US4188180A (en) * | 1977-12-02 | 1980-02-12 | Honeywell Inc. | Fuel burner safe starting system |
-
1987
- 1987-08-11 JP JP1987123060U patent/JPH0437614Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57199026U (en) * | 1981-06-10 | 1982-12-17 | ||
| JPS5918230U (en) * | 1982-07-28 | 1984-02-03 | 富士電機株式会社 | Air diffusion type high performance filter |
| JPS6020050A (en) * | 1983-07-15 | 1985-02-01 | Matsushita Electric Ind Co Ltd | Device to mix water with hot-water |
| JPS6161011U (en) * | 1984-09-27 | 1986-04-24 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7297050B2 (en) | 2001-05-14 | 2007-11-20 | Acanthe | Method and device for diffusing a protective flux with regard to a surrounding environment |
| JP2011226770A (en) * | 2010-03-29 | 2011-11-10 | Shimizu Corp | Air conditioning system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437614Y2 (en) | 1992-09-03 |