JPH0262340U - - Google Patents
Info
- Publication number
- JPH0262340U JPH0262340U JP29589U JP29589U JPH0262340U JP H0262340 U JPH0262340 U JP H0262340U JP 29589 U JP29589 U JP 29589U JP 29589 U JP29589 U JP 29589U JP H0262340 U JPH0262340 U JP H0262340U
- Authority
- JP
- Japan
- Prior art keywords
- clean
- tunnel
- opening
- hepa filter
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ventilation (AREA)
Description
第１図は本考案のクリーントンネルの縦断面図
、第２図は第１図のＡ部拡大図、第３図および第
４図は整流板を有しない場合と有する場合の気流
分布を示した図、第５図は本考案のクリーントン
ネル装置の配置例を示した天井部平面図である。
１…クリーンルーム（通路）、２…開口、３…
クリーントンネル、４…ＨＥＰＡフイルター、５
…ＨＥＰＡフイルター、６…フード、７…機械類
、９…整流板、１４…排気口、１７…吸盤、１８
…支持棒。
Figure 1 is a vertical sectional view of the clean tunnel of the present invention, Figure 2 is an enlarged view of section A in Figure 1, and Figures 3 and 4 show airflow distribution with and without a rectifier plate. FIG. 5 is a plan view of the ceiling showing an example of the arrangement of the clean tunnel device of the present invention. 1...Clean room (passage), 2...Opening, 3...
Clean tunnel, 4...HEPA filter, 5
…HEPA filter, 6…hood, 7…machines, 9…straightening plate, 14…exhaust port, 17…sucker, 18
...Support rod.
Claims (1)
と連通する開口２を有するクリーントンネル３を
形成した設備であつて、該クリーントンネル３の
天井部にクリーンルーム１用のＨＥＰＡフイルタ
ー４よりもハイクラスのＨＥＰＡフイルター５を
水平に配置すると共に前記開口２の上部に垂直な
フード６を設置し、斯くして構成されるクリーン
トンネル３内に機械または作業台７を設置したう
えこれらに向けて該ＨＥＰＡフイルター５から清
浄空気を下向きに吹付けるようにしたクリーント
ンネル装置において、該フード６の垂直面と平行
な垂直面をもつ整流板９を、該開口２の位置に該
機械または作業台７とは間隔をあけて設置したこ
とを特徴とするクリーントンネル装置。 This clean room 1 inside clean room 1
This equipment has a clean tunnel 3 having an opening 2 communicating with the clean tunnel 3, and a HEPA filter 5 of a higher class than the HEPA filter 4 for the clean room 1 is horizontally arranged on the ceiling of the clean tunnel 3, and the opening 2 A vertical hood 6 is installed on the top of the machine, a machine or a workbench 7 is installed inside the clean tunnel 3 constructed in this way, and clean air is blown downward from the HEPA filter 5 towards them. A clean tunnel device characterized in that a rectifying plate 9 having a vertical surface parallel to the vertical surface of the hood 6 is installed at the position of the opening 2 with a distance from the machine or the workbench 7. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29589U JPH035807Y2 (en) | 1989-01-07 | 1989-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29589U JPH035807Y2 (en) | 1989-01-07 | 1989-01-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0262340U true JPH0262340U (en) | 1990-05-09 |
| JPH035807Y2 JPH035807Y2 (en) | 1991-02-14 |
Family
ID=31199195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29589U Expired JPH035807Y2 (en) | 1989-01-07 | 1989-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH035807Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013104627A (en) * | 2011-11-15 | 2013-05-30 | Takasago Thermal Eng Co Ltd | Air conditioning system of information processing equipment room |
| JP2019090576A (en) * | 2017-11-15 | 2019-06-13 | 株式会社桜アーク | Cleaning unit |
-
1989
- 1989-01-07 JP JP29589U patent/JPH035807Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013104627A (en) * | 2011-11-15 | 2013-05-30 | Takasago Thermal Eng Co Ltd | Air conditioning system of information processing equipment room |
| JP2019090576A (en) * | 2017-11-15 | 2019-06-13 | 株式会社桜アーク | Cleaning unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH035807Y2 (en) | 1991-02-14 |
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