JPS62106961U - - Google Patents
Info
- Publication number
- JPS62106961U JPS62106961U JP19560485U JP19560485U JPS62106961U JP S62106961 U JPS62106961 U JP S62106961U JP 19560485 U JP19560485 U JP 19560485U JP 19560485 U JP19560485 U JP 19560485U JP S62106961 U JPS62106961 U JP S62106961U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- source
- metal
- cooling trap
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 238000005566 electron beam evaporation Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19560485U JPS62106961U (de) | 1985-12-19 | 1985-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19560485U JPS62106961U (de) | 1985-12-19 | 1985-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62106961U true JPS62106961U (de) | 1987-07-08 |
Family
ID=31153640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19560485U Pending JPS62106961U (de) | 1985-12-19 | 1985-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62106961U (de) |
-
1985
- 1985-12-19 JP JP19560485U patent/JPS62106961U/ja active Pending