JPS6210410B2 - - Google Patents
Info
- Publication number
- JPS6210410B2 JPS6210410B2 JP4626379A JP4626379A JPS6210410B2 JP S6210410 B2 JPS6210410 B2 JP S6210410B2 JP 4626379 A JP4626379 A JP 4626379A JP 4626379 A JP4626379 A JP 4626379A JP S6210410 B2 JPS6210410 B2 JP S6210410B2
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- crystal plate
- film
- optical image
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 49
- 230000003287 optical effect Effects 0.000 claims description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 14
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 10
- 235000012239 silicon dioxide Nutrition 0.000 claims description 9
- 239000000377 silicon dioxide Substances 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims description 2
- 230000005693 optoelectronics Effects 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 claims 3
- 239000002131 composite material Substances 0.000 claims 2
- 239000010410 layer Substances 0.000 claims 2
- 239000010408 film Substances 0.000 description 29
- JSILWGOAJSWOGY-UHFFFAOYSA-N bismuth;oxosilicon Chemical compound [Bi].[Si]=O JSILWGOAJSWOGY-UHFFFAOYSA-N 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 238000009826 distribution Methods 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- 230000001681 protective effect Effects 0.000 description 8
- 239000010409 thin film Substances 0.000 description 7
- 230000015556 catabolic process Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 5
- 229920000052 poly(p-xylylene) Polymers 0.000 description 5
- -1 polyparaxylylene Polymers 0.000 description 5
- 229910000077 silane Inorganic materials 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 230000001427 coherent effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- ZYCVCWCDWHVKPP-UHFFFAOYSA-N dibismuth germanium(4+) oxygen(2-) Chemical compound [O--].[O--].[O--].[O--].[O--].[O--].[O--].[Ge+4].[Ge+4].[Bi+3].[Bi+3] ZYCVCWCDWHVKPP-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4626379A JPS55138712A (en) | 1979-04-16 | 1979-04-16 | Light image element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4626379A JPS55138712A (en) | 1979-04-16 | 1979-04-16 | Light image element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55138712A JPS55138712A (en) | 1980-10-29 |
| JPS6210410B2 true JPS6210410B2 (enrdf_load_stackoverflow) | 1987-03-06 |
Family
ID=12742313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4626379A Granted JPS55138712A (en) | 1979-04-16 | 1979-04-16 | Light image element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55138712A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58225549A (ja) * | 1982-06-25 | 1983-12-27 | Agency Of Ind Science & Technol | 光画像増幅器 |
-
1979
- 1979-04-16 JP JP4626379A patent/JPS55138712A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55138712A (en) | 1980-10-29 |
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