JPS62103949A - 集束イオンビ−ム装置 - Google Patents

集束イオンビ−ム装置

Info

Publication number
JPS62103949A
JPS62103949A JP60244976A JP24497685A JPS62103949A JP S62103949 A JPS62103949 A JP S62103949A JP 60244976 A JP60244976 A JP 60244976A JP 24497685 A JP24497685 A JP 24497685A JP S62103949 A JPS62103949 A JP S62103949A
Authority
JP
Japan
Prior art keywords
ion beam
aperture
exb
ion
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60244976A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580784B2 (en:Method
Inventor
Ryuzo Aihara
相原　龍三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60244976A priority Critical patent/JPS62103949A/ja
Publication of JPS62103949A publication Critical patent/JPS62103949A/ja
Publication of JPH0580784B2 publication Critical patent/JPH0580784B2/ja
Granted legal-status Critical Current

Links

JP60244976A 1985-10-30 1985-10-30 集束イオンビ−ム装置 Granted JPS62103949A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60244976A JPS62103949A (ja) 1985-10-30 1985-10-30 集束イオンビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60244976A JPS62103949A (ja) 1985-10-30 1985-10-30 集束イオンビ−ム装置

Publications (2)

Publication Number Publication Date
JPS62103949A true JPS62103949A (ja) 1987-05-14
JPH0580784B2 JPH0580784B2 (en:Method) 1993-11-10

Family

ID=17126745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60244976A Granted JPS62103949A (ja) 1985-10-30 1985-10-30 集束イオンビ−ム装置

Country Status (1)

Country Link
JP (1) JPS62103949A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6339853U (en:Method) * 1986-08-29 1988-03-15

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220263A (ja) * 1985-03-27 1986-09-30 Hitachi Ltd イオンマイクロビ−ム装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220263A (ja) * 1985-03-27 1986-09-30 Hitachi Ltd イオンマイクロビ−ム装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6339853U (en:Method) * 1986-08-29 1988-03-15

Also Published As

Publication number Publication date
JPH0580784B2 (en:Method) 1993-11-10

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