JPS6210305B2 - - Google Patents

Info

Publication number
JPS6210305B2
JPS6210305B2 JP22865382A JP22865382A JPS6210305B2 JP S6210305 B2 JPS6210305 B2 JP S6210305B2 JP 22865382 A JP22865382 A JP 22865382A JP 22865382 A JP22865382 A JP 22865382A JP S6210305 B2 JPS6210305 B2 JP S6210305B2
Authority
JP
Japan
Prior art keywords
etching
electrode
sample
reaction gas
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22865382A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59123770A (ja
Inventor
Eiichi Hoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP22865382A priority Critical patent/JPS59123770A/ja
Publication of JPS59123770A publication Critical patent/JPS59123770A/ja
Publication of JPS6210305B2 publication Critical patent/JPS6210305B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP22865382A 1982-12-28 1982-12-28 エツチング方法 Granted JPS59123770A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22865382A JPS59123770A (ja) 1982-12-28 1982-12-28 エツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22865382A JPS59123770A (ja) 1982-12-28 1982-12-28 エツチング方法

Publications (2)

Publication Number Publication Date
JPS59123770A JPS59123770A (ja) 1984-07-17
JPS6210305B2 true JPS6210305B2 (enrdf_load_stackoverflow) 1987-03-05

Family

ID=16879703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22865382A Granted JPS59123770A (ja) 1982-12-28 1982-12-28 エツチング方法

Country Status (1)

Country Link
JP (1) JPS59123770A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS59123770A (ja) 1984-07-17

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