JPS62100835U - - Google Patents
Info
- Publication number
- JPS62100835U JPS62100835U JP19381985U JP19381985U JPS62100835U JP S62100835 U JPS62100835 U JP S62100835U JP 19381985 U JP19381985 U JP 19381985U JP 19381985 U JP19381985 U JP 19381985U JP S62100835 U JPS62100835 U JP S62100835U
- Authority
- JP
- Japan
- Prior art keywords
- attracted
- suction surface
- vacuum chuck
- elastic body
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985193819U JPH0243638Y2 (US06262066-20010717-C00315.png) | 1985-12-16 | 1985-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985193819U JPH0243638Y2 (US06262066-20010717-C00315.png) | 1985-12-16 | 1985-12-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62100835U true JPS62100835U (US06262066-20010717-C00315.png) | 1987-06-26 |
| JPH0243638Y2 JPH0243638Y2 (US06262066-20010717-C00315.png) | 1990-11-20 |
Family
ID=31150199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985193819U Expired JPH0243638Y2 (US06262066-20010717-C00315.png) | 1985-12-16 | 1985-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0243638Y2 (US06262066-20010717-C00315.png) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0312948A (ja) * | 1989-06-12 | 1991-01-21 | Nikon Corp | 基板ホルダ |
| JPH11307619A (ja) * | 1998-04-20 | 1999-11-05 | Yamatake Corp | ウエハ固定装置 |
| JPH11309638A (ja) * | 1998-04-28 | 1999-11-09 | Kyocera Corp | 真空吸着盤 |
| JP2017220483A (ja) * | 2016-06-03 | 2017-12-14 | 日本特殊陶業株式会社 | 真空チャック及び真空チャックの製造方法 |
| WO2019049596A1 (ja) * | 2017-09-07 | 2019-03-14 | Ｓｔｓ合同会社 | 取付具 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54164982U (US06262066-20010717-C00315.png) * | 1978-05-11 | 1979-11-19 |
-
1985
- 1985-12-16 JP JP1985193819U patent/JPH0243638Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54164982U (US06262066-20010717-C00315.png) * | 1978-05-11 | 1979-11-19 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0312948A (ja) * | 1989-06-12 | 1991-01-21 | Nikon Corp | 基板ホルダ |
| JPH11307619A (ja) * | 1998-04-20 | 1999-11-05 | Yamatake Corp | ウエハ固定装置 |
| JPH11309638A (ja) * | 1998-04-28 | 1999-11-09 | Kyocera Corp | 真空吸着盤 |
| JP2017220483A (ja) * | 2016-06-03 | 2017-12-14 | 日本特殊陶業株式会社 | 真空チャック及び真空チャックの製造方法 |
| WO2019049596A1 (ja) * | 2017-09-07 | 2019-03-14 | Ｓｔｓ合同会社 | 取付具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0243638Y2 (US06262066-20010717-C00315.png) | 1990-11-20 |
