JPS6210045B2 - - Google Patents

Info

Publication number
JPS6210045B2
JPS6210045B2 JP54131557A JP13155779A JPS6210045B2 JP S6210045 B2 JPS6210045 B2 JP S6210045B2 JP 54131557 A JP54131557 A JP 54131557A JP 13155779 A JP13155779 A JP 13155779A JP S6210045 B2 JPS6210045 B2 JP S6210045B2
Authority
JP
Japan
Prior art keywords
electrode fingers
response
width
electrode
zero
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54131557A
Other languages
Japanese (ja)
Other versions
JPS5656028A (en
Inventor
Michio Kadota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP13155779A priority Critical patent/JPS5656028A/en
Publication of JPS5656028A publication Critical patent/JPS5656028A/en
Publication of JPS6210045B2 publication Critical patent/JPS6210045B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02818Means for compensation or elimination of undesirable effects
    • H03H9/02881Means for compensation or elimination of undesirable effects of diffraction of wave beam
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517Means for weighting
    • H03H9/1452Means for weighting by finger overlap length, apodisation

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Description

【発明の詳細な説明】 本発明はインターデイジタル電極を用いた弾性
表面波フイルタに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface acoustic wave filter using interdigital electrodes.

一般に、アポダイズドされたインターデイジタ
ル電極は、所望周波数特性をフーリエ逆変換して
インパルス応答を求め、このインパルス応答の時
間に対応させて電極ピツチを規定し、応答の大き
さに対応させて隣接する異電位の電極指間の交さ
幅を規定して構成されており、これを交さ幅重み
付けという。実際のインパルス応答では各応答を
結ぶ一組の包絡線が交わる場合が多々あり、この
場合にはその交点付近において応答の大きさが非
常に小さくなり、対応する電極指間の交さ幅も非
常に小さくなる。このような交さ幅の小さい対の
電極指は、その指間で励振される表面波が拡散し
易く、したがつて回折損が大きくなり、また電極
指をフオトエツチング処理などで製造する際、そ
の製造上の寸法バラツキにより大きな影響を受
け、得られる周波数特性が所望周波数特性から大
きくずれる。
Generally, for an apodized interdigital electrode, an impulse response is determined by inverse Fourier transform of the desired frequency characteristic, the electrode pitch is defined in correspondence with the time of this impulse response, and the adjacent difference is determined in correspondence with the magnitude of the response. It is configured by specifying the crossing width between potential electrode fingers, and this is called crossing width weighting. In an actual impulse response, a set of envelopes connecting each response often intersects, and in this case, the magnitude of the response becomes very small near the intersection, and the width of the intersection between the corresponding electrode fingers is also very small. becomes smaller. In such a pair of electrode fingers with a small intersecting width, the surface waves excited between the fingers are likely to diffuse, resulting in large diffraction loss. It is greatly affected by dimensional variations during manufacturing, and the resulting frequency characteristics deviate greatly from the desired frequency characteristics.

また、リフレクシヨン法などにより電極パター
ンを設計した場合には、一組の包絡線が交わる付
近だけでなく、それ以外の領域においても応答の
小さいものが生じ、この場合にも上述と同様の間
題が起こる。
In addition, when an electrode pattern is designed using a reflection method, small responses occur not only near the intersection of a set of envelopes but also in other areas, and in this case, the same period of time as described above occurs. A problem arises.

そこで、本発明は上述した従来の欠点をことご
とく除去したもので、回折損を小さく、かつ製造
バラツキの影響を極力押さえて、得られる周波数
特性と所望周波数特性の誤差を小さくした弾性表
面波フイルタを提供することを目的とする。
Therefore, the present invention eliminates all of the above-mentioned conventional drawbacks, and provides a surface acoustic wave filter that has low diffraction loss, suppresses the influence of manufacturing variations as much as possible, and reduces the error between the obtained frequency characteristics and the desired frequency characteristics. The purpose is to provide.

すなわち本発明は、インパルス応答における最
大応答に比して6%以下の大きさを有する応答に
対応する、隣接する異電位の電極指間の交さ幅を
零としたインターデイジタル電極を備えるもので
ある。
That is, the present invention is equipped with interdigital electrodes that correspond to a response having a magnitude of 6% or less compared to the maximum response in an impulse response, and have zero crossing width between adjacent electrode fingers of different potentials. be.

以下、本発明の実施例を図面を参照しつつ詳述
する。
Embodiments of the present invention will be described in detail below with reference to the drawings.

既に知られているように、帯域通過フイルタの
インパルス応答は、所望周波数特性をフーリエ逆
変換して得られるもので、例えば第1図に示すよ
うになる。このインパルス応答は、複数箇所で応
答が極小値を示して、一組の包絡線1,2が3,
4,5,6,7,8で交さする。例えば、フーリ
エ逆変換された重み付け関係がsin x/xで、帯域
幅 がWのフイルタでは、インパルス応答の時間軸上
で1/W、2/W、3/W、……の位置に応答の極小値
すなわち交さ点をもつ。このようなインパルス応
答に対応させてインターデイジタル電極が構成さ
れる。
As is already known, the impulse response of a bandpass filter is obtained by inverse Fourier transform of a desired frequency characteristic, as shown in FIG. 1, for example. In this impulse response, the response shows minimum values at multiple locations, and a set of envelopes 1 and 2 is 3,
Intersect at 4, 5, 6, 7, 8. For example, in a filter whose weighting relationship is sin x/x after inverse Fourier transform and whose bandwidth is W, the response is at positions 1/W, 2/W, 3/W, etc. on the time axis of the impulse response. It has a minimum value or intersection point. Interdigital electrodes are configured to correspond to such impulse responses.

インターデイジタル電極は一対のくし歯電極が
相互に差し込まれて構成されたもので、そのくし
歯電極は多数の電極指を有している。各電極指は
電極ピツチ(異電位の隣接する電極指の中心間距
離)をインパルス応答の時間間隔に比例的に対応
させて配列されている。そして、異電位の隣接す
る電極指間の交さ幅は、インパルス応答の最大応
答(第1図では記号9で示す応答)の6%以下の
大きさを有する微小応答を除いて、各応答の大き
さに比例的に対応させて設定されている。包絡線
1,2の交さ点3,4,5,6,7,8付近に存
在する6%以下の大きさを有する微小応答に対応
する電極指間は、交さしないように電極指が設け
られている。一例を第2図に示す。同図は第1図
のインパルス応答の交さ点3付近を示したもので
ある。同図において、破線で囲まれた部分は最大
応答に比し6%を越える大きさの応答に対応させ
て各電極指が形成されている。そして、本来ほぼ
零振源となるべき振源を含み、最大応答に比して
6%以下の大きさを有する、複数の振源が零振源
とされている。具体的には、電極指10と11、
電極指11と12、電極指12と13、電極指1
3と14、電極指14と15、電極指15と16
間は6%以下の大きさの応答に対応するもので、
それぞれ交さしないように対向する電極指が離間
して設けられている。この結果、交さ幅を零とし
た電極指の両側に位置する電極指10,16は必
然的に同電位となり、この間の領域では表面波が
励振されることはない。第3図は第1図のインパ
ルス応答に対応させたインターデイジタル電極の
指先端を結ぶ包絡線のみを示すもので、17,1
8,19,20,21,22が交さ幅零の部分で
ある。本実施例で、最大応答の6%以下の応答に
対応する交さ幅のみ零にしているのは、6%以下
のものでは表面波回折が大きく、かつ寸法誤差の
影響を大きく受け易く、また6%を越えたものを
零にすると周波数特性を大きく狂わす恐れがある
からである。
The interdigital electrode is composed of a pair of comb-shaped electrodes inserted into each other, and the comb-shaped electrode has a large number of electrode fingers. Each electrode finger is arranged such that the electrode pitch (the distance between the centers of adjacent electrode fingers having different potentials) corresponds proportionally to the time interval of the impulse response. The crossing width between adjacent electrode fingers of different potentials is the width of each response, except for a minute response that is less than 6% of the maximum impulse response (response indicated by symbol 9 in Figure 1). It is set proportionally to the size. The electrode fingers corresponding to minute responses with a magnitude of 6% or less existing near the intersection points 3, 4, 5, 6, 7, and 8 of the envelopes 1 and 2 are arranged so that they do not intersect. It is provided. An example is shown in FIG. This figure shows the vicinity of the intersection point 3 of the impulse responses in FIG. In the figure, each electrode finger is formed in a portion surrounded by a broken line to correspond to a response greater than 6% of the maximum response. A plurality of vibration sources, including a vibration source that should essentially be a substantially zero vibration source, have a magnitude of 6% or less compared to the maximum response, and are considered to be zero vibration sources. Specifically, electrode fingers 10 and 11,
Electrode fingers 11 and 12, electrode fingers 12 and 13, electrode finger 1
3 and 14, electrode fingers 14 and 15, electrode fingers 15 and 16
The interval corresponds to a response with a magnitude of 6% or less,
Opposing electrode fingers are provided spaced apart so that they do not intersect. As a result, the electrode fingers 10 and 16 located on both sides of the electrode fingers with zero crossing width are necessarily at the same potential, and no surface waves are excited in the area between them. Figure 3 shows only the envelope connecting the finger tips of the interdigital electrodes corresponding to the impulse response in Figure 1, and shows 17,1
8, 19, 20, 21, and 22 intersect and have zero width. In this example, only the intersection width corresponding to a response of 6% or less of the maximum response is set to zero because if the response is 6% or less, surface wave diffraction is large and it is highly susceptible to dimensional errors. This is because if a value exceeding 6% is set to zero, the frequency characteristics may be greatly disturbed.

本実施例によれば、交さ幅の小さい励振源がな
くなるので、それによつて生ずる大きな回折損が
発生しなくなる。また、フオトエツチングなどで
電極指を形成する際、指寸法にバラツキが生じ易
く、特に従来では交さ幅の小さいものに相対的に
大きな影響を与えていたが、本実施例によれば、
そのような影響はない。したがつて、回折損、製
造バラツキの影響を極力押さえることができ、設
計時の所望周波数特性と得られる実際の周波数特
性を近付けることができる。
According to this embodiment, since there is no excitation source with a small intersecting width, the large diffraction loss caused by it is no longer generated. Furthermore, when forming electrode fingers by photo etching or the like, variations in the finger dimensions tend to occur, and in the past, this had a relatively large effect on those with a small intersecting width, but according to this embodiment,
There is no such effect. Therefore, the effects of diffraction loss and manufacturing variations can be suppressed as much as possible, and the desired frequency characteristics at the time of design can be brought close to the actual frequency characteristics obtained.

上記実施例はシングル型電極指のものを示して
いるが、本発明によればスプリツト型電極指につ
いても同様に適用できるものである。また、リフ
レクシヨン手法などによりインターデイジタル電
極を形成する場合には、インパルス応答の包絡線
が交さする部分以外にも、最大応答に比し6%以
下の大きさをもつ応答が生ずることがあるが、こ
れらの応答についても上記と同様に交さ幅を零に
構成するようにするとよい。さらに、上記実施例
では6%以下の大きさの応答に対応するものはす
べて交さ幅を零としているが、場合によつては、
部分的に零にするだけでもよい。さらにまた、音
速の均一化を図るため、上記実施例においてダミ
ー電極を追加してもよいことはもちろんである。
Although the above-mentioned embodiment shows a single-type electrode finger, the present invention can be similarly applied to a split-type electrode finger. Additionally, when forming interdigital electrodes using a reflection method, a response with a magnitude of 6% or less compared to the maximum response may occur in areas other than the intersection of the impulse response envelopes. However, it is preferable to configure the intersection width to be zero for these responses as well, as described above. Furthermore, in the above embodiment, the intersection width is set to zero for all responses corresponding to a magnitude of 6% or less, but in some cases,
You can just partially reduce it to zero. Furthermore, in order to equalize the speed of sound, it goes without saying that a dummy electrode may be added to the above embodiment.

本発明は、以上説明したような構成からなるの
で、回折損が小さくなり、製造バラツキによる影
響が大幅に小さくなつて、所望周波数特性に近い
特性が得られるという、実用上大きな効果を有す
る。
Since the present invention has the configuration as described above, it has great practical effects in that diffraction loss is reduced, the influence of manufacturing variations is greatly reduced, and characteristics close to desired frequency characteristics can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明による弾性表面波フイルタを説明す
るためのもので、第1図はインパルス応答図、第
2図はインターデイジタル電極の要部パターンを
示す図、第3図はインターデイジタル電極の包絡
線を示す図である。
The figures are for explaining the surface acoustic wave filter according to the present invention. Figure 1 is an impulse response diagram, Figure 2 is a diagram showing the main part pattern of the interdigital electrode, and Figure 3 is the envelope of the interdigital electrode. FIG.

Claims (1)

【特許請求の範囲】[Claims] 1 所望周波数特性に基づくインパルス応答に対
応させて、隣接する異電位の電極指の交さ幅を選
定するようにした交さ幅重み付けインターデイジ
タル電極を備える弾性表面波フイルタにおいて、
前記インパルス応答における最大応答に比して6
%以下の大きさを有する応答に対応する、複数の
電極指の交さ幅を零とし、かつこの交さ幅を零と
した電極指の両側に位置する電極指を同電位とし
たことを特徴とする弾性表面波フイルタ。
1. In a surface acoustic wave filter equipped with interdigital electrodes with weighted crossing widths, the crossing width of adjacent electrode fingers of different potentials is selected in accordance with an impulse response based on desired frequency characteristics.
6 compared to the maximum response in the impulse response.
% or less, the intersecting width of a plurality of electrode fingers is set to zero, and the electrode fingers located on both sides of the electrode fingers with this intersecting width of zero are set at the same potential. surface acoustic wave filter.
JP13155779A 1979-10-11 1979-10-11 Elastic surface wave filter Granted JPS5656028A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13155779A JPS5656028A (en) 1979-10-11 1979-10-11 Elastic surface wave filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13155779A JPS5656028A (en) 1979-10-11 1979-10-11 Elastic surface wave filter

Publications (2)

Publication Number Publication Date
JPS5656028A JPS5656028A (en) 1981-05-16
JPS6210045B2 true JPS6210045B2 (en) 1987-03-04

Family

ID=15060843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13155779A Granted JPS5656028A (en) 1979-10-11 1979-10-11 Elastic surface wave filter

Country Status (1)

Country Link
JP (1) JPS5656028A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0536177U (en) * 1991-10-18 1993-05-18 フジ精機株式会社 solenoid valve

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528678A (en) * 1978-08-22 1980-02-29 Nec Corp Reed screen shape electrode

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528678A (en) * 1978-08-22 1980-02-29 Nec Corp Reed screen shape electrode

Also Published As

Publication number Publication date
JPS5656028A (en) 1981-05-16

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