JPS6199682U - - Google Patents
Info
- Publication number
- JPS6199682U JPS6199682U JP18360484U JP18360484U JPS6199682U JP S6199682 U JPS6199682 U JP S6199682U JP 18360484 U JP18360484 U JP 18360484U JP 18360484 U JP18360484 U JP 18360484U JP S6199682 U JPS6199682 U JP S6199682U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- rotary vacuum
- oil
- oil rotary
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003595 mist Substances 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Separating Particles In Gases By Inertia (AREA)
- Drying Of Semiconductors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984183604U JPH0121187Y2 (el) | 1984-12-05 | 1984-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984183604U JPH0121187Y2 (el) | 1984-12-05 | 1984-12-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6199682U true JPS6199682U (el) | 1986-06-25 |
| JPH0121187Y2 JPH0121187Y2 (el) | 1989-06-23 |
Family
ID=30741102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984183604U Expired JPH0121187Y2 (el) | 1984-12-05 | 1984-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0121187Y2 (el) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01130093A (ja) * | 1987-11-13 | 1989-05-23 | Hitachi Ltd | 真空ポンプ |
| JPH02103933A (ja) * | 1988-10-13 | 1990-04-17 | Supiide Fuamu Clean Syst Kk | エアによるワークの乾燥方法及び装置 |
| JP2006043528A (ja) * | 2004-08-02 | 2006-02-16 | Inoue Mfg Inc | 真空式ミキサー |
| CN109098952A (zh) * | 2018-08-30 | 2018-12-28 | 西安交通大学 | 一种轴流式离心分离器及油气分离方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59162116A (ja) * | 1983-03-03 | 1984-09-13 | Semiconductor Energy Lab Co Ltd | シリコン被膜作製方法 |
-
1984
- 1984-12-05 JP JP1984183604U patent/JPH0121187Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59162116A (ja) * | 1983-03-03 | 1984-09-13 | Semiconductor Energy Lab Co Ltd | シリコン被膜作製方法 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01130093A (ja) * | 1987-11-13 | 1989-05-23 | Hitachi Ltd | 真空ポンプ |
| JPH02103933A (ja) * | 1988-10-13 | 1990-04-17 | Supiide Fuamu Clean Syst Kk | エアによるワークの乾燥方法及び装置 |
| JP2006043528A (ja) * | 2004-08-02 | 2006-02-16 | Inoue Mfg Inc | 真空式ミキサー |
| JP4700303B2 (ja) * | 2004-08-02 | 2011-06-15 | 株式会社井上製作所 | 真空式ミキサー |
| CN109098952A (zh) * | 2018-08-30 | 2018-12-28 | 西安交通大学 | 一种轴流式离心分离器及油气分离方法 |
| CN109098952B (zh) * | 2018-08-30 | 2019-08-23 | 西安交通大学 | 一种轴流式离心分离器及油气分离方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0121187Y2 (el) | 1989-06-23 |