JPS6199043U - - Google Patents

Info

Publication number
JPS6199043U
JPS6199043U JP1984183662U JP18366284U JPS6199043U JP S6199043 U JPS6199043 U JP S6199043U JP 1984183662 U JP1984183662 U JP 1984183662U JP 18366284 U JP18366284 U JP 18366284U JP S6199043 U JPS6199043 U JP S6199043U
Authority
JP
Japan
Prior art keywords
central part
light
forward scattered
scattered light
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984183662U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328363Y2 (US20080293856A1-20081127-C00150.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984183662U priority Critical patent/JPH0328363Y2/ja
Publication of JPS6199043U publication Critical patent/JPS6199043U/ja
Application granted granted Critical
Publication of JPH0328363Y2 publication Critical patent/JPH0328363Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1984183662U 1984-12-05 1984-12-05 Expired JPH0328363Y2 (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984183662U JPH0328363Y2 (US20080293856A1-20081127-C00150.png) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984183662U JPH0328363Y2 (US20080293856A1-20081127-C00150.png) 1984-12-05 1984-12-05

Publications (2)

Publication Number Publication Date
JPS6199043U true JPS6199043U (US20080293856A1-20081127-C00150.png) 1986-06-25
JPH0328363Y2 JPH0328363Y2 (US20080293856A1-20081127-C00150.png) 1991-06-18

Family

ID=30741160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984183662U Expired JPH0328363Y2 (US20080293856A1-20081127-C00150.png) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPH0328363Y2 (US20080293856A1-20081127-C00150.png)

Also Published As

Publication number Publication date
JPH0328363Y2 (US20080293856A1-20081127-C00150.png) 1991-06-18

Similar Documents

Publication Publication Date Title
JPS6199043U (US20080293856A1-20081127-C00150.png)
JPS62108855U (US20080293856A1-20081127-C00150.png)
JPS57186106A (en) Inspection device for surface
JPS62180758U (US20080293856A1-20081127-C00150.png)
JPS61158840U (US20080293856A1-20081127-C00150.png)
JPS62158339U (US20080293856A1-20081127-C00150.png)
JPS6253349U (US20080293856A1-20081127-C00150.png)
JPH03117749U (US20080293856A1-20081127-C00150.png)
JPS61199661U (US20080293856A1-20081127-C00150.png)
JPH0542326Y2 (US20080293856A1-20081127-C00150.png)
JPS61205059U (US20080293856A1-20081127-C00150.png)
JPH0618230A (ja) 厚み測定装置
JPH0269702U (US20080293856A1-20081127-C00150.png)
JPS6465406A (en) Interferometer for flatness measurement
JPS62199664U (US20080293856A1-20081127-C00150.png)
JPS63181950U (US20080293856A1-20081127-C00150.png)
JPH01104507U (US20080293856A1-20081127-C00150.png)
JPS62119606U (US20080293856A1-20081127-C00150.png)
JPS59113707U (ja) 鏡面体の表面検査装置
JPH01140817U (US20080293856A1-20081127-C00150.png)
JPS5995205U (ja) レ−ザ−干渉計
JPS61269045A (ja) レ−ザ式の透過光形表面検査装置
JPH01144809U (US20080293856A1-20081127-C00150.png)
JPH0416345U (US20080293856A1-20081127-C00150.png)
JPS6235209U (US20080293856A1-20081127-C00150.png)