JPS6198865U - - Google Patents

Info

Publication number
JPS6198865U
JPS6198865U JP18544184U JP18544184U JPS6198865U JP S6198865 U JPS6198865 U JP S6198865U JP 18544184 U JP18544184 U JP 18544184U JP 18544184 U JP18544184 U JP 18544184U JP S6198865 U JPS6198865 U JP S6198865U
Authority
JP
Japan
Prior art keywords
cylindrical part
plate
vacuum evaporation
evaporation apparatus
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18544184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18544184U priority Critical patent/JPS6198865U/ja
Publication of JPS6198865U publication Critical patent/JPS6198865U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18544184U 1984-12-05 1984-12-05 Pending JPS6198865U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18544184U JPS6198865U (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18544184U JPS6198865U (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Publications (1)

Publication Number Publication Date
JPS6198865U true JPS6198865U (enrdf_load_stackoverflow) 1986-06-24

Family

ID=30742911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18544184U Pending JPS6198865U (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPS6198865U (enrdf_load_stackoverflow)

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