JPS6163831U - - Google Patents

Info

Publication number
JPS6163831U
JPS6163831U JP14734484U JP14734484U JPS6163831U JP S6163831 U JPS6163831 U JP S6163831U JP 14734484 U JP14734484 U JP 14734484U JP 14734484 U JP14734484 U JP 14734484U JP S6163831 U JPS6163831 U JP S6163831U
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JP
Japan
Prior art keywords
thick substrate
mask
holder
substrate
front surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14734484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH019152Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14734484U priority Critical patent/JPH019152Y2/ja
Publication of JPS6163831U publication Critical patent/JPS6163831U/ja
Application granted granted Critical
Publication of JPH019152Y2 publication Critical patent/JPH019152Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP14734484U 1984-10-01 1984-10-01 Expired JPH019152Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14734484U JPH019152Y2 (enrdf_load_stackoverflow) 1984-10-01 1984-10-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14734484U JPH019152Y2 (enrdf_load_stackoverflow) 1984-10-01 1984-10-01

Publications (2)

Publication Number Publication Date
JPS6163831U true JPS6163831U (enrdf_load_stackoverflow) 1986-04-30
JPH019152Y2 JPH019152Y2 (enrdf_load_stackoverflow) 1989-03-13

Family

ID=30705573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14734484U Expired JPH019152Y2 (enrdf_load_stackoverflow) 1984-10-01 1984-10-01

Country Status (1)

Country Link
JP (1) JPH019152Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH019152Y2 (enrdf_load_stackoverflow) 1989-03-13

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