JPS6190854U - - Google Patents

Info

Publication number
JPS6190854U
JPS6190854U JP17242184U JP17242184U JPS6190854U JP S6190854 U JPS6190854 U JP S6190854U JP 17242184 U JP17242184 U JP 17242184U JP 17242184 U JP17242184 U JP 17242184U JP S6190854 U JPS6190854 U JP S6190854U
Authority
JP
Japan
Prior art keywords
flat
engages
processing apparatus
vacuum processing
circumferential surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17242184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037391Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17242184U priority Critical patent/JPH037391Y2/ja
Publication of JPS6190854U publication Critical patent/JPS6190854U/ja
Application granted granted Critical
Publication of JPH037391Y2 publication Critical patent/JPH037391Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Physical Vapour Deposition (AREA)
JP17242184U 1984-11-15 1984-11-15 Expired JPH037391Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17242184U JPH037391Y2 (enrdf_load_stackoverflow) 1984-11-15 1984-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17242184U JPH037391Y2 (enrdf_load_stackoverflow) 1984-11-15 1984-11-15

Publications (2)

Publication Number Publication Date
JPS6190854U true JPS6190854U (enrdf_load_stackoverflow) 1986-06-12
JPH037391Y2 JPH037391Y2 (enrdf_load_stackoverflow) 1991-02-25

Family

ID=30730087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17242184U Expired JPH037391Y2 (enrdf_load_stackoverflow) 1984-11-15 1984-11-15

Country Status (1)

Country Link
JP (1) JPH037391Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH037391Y2 (enrdf_load_stackoverflow) 1991-02-25

Similar Documents

Publication Publication Date Title
JPS6190854U (enrdf_load_stackoverflow)
JPH03107522U (enrdf_load_stackoverflow)
JPH0350049U (enrdf_load_stackoverflow)
JPH0341214U (enrdf_load_stackoverflow)
JPH0217268U (enrdf_load_stackoverflow)
JPS6260254U (enrdf_load_stackoverflow)
JPS6420441U (enrdf_load_stackoverflow)
JPS61207106U (enrdf_load_stackoverflow)
JPH01174884U (enrdf_load_stackoverflow)
JPS63153531U (enrdf_load_stackoverflow)
JPH0386386U (enrdf_load_stackoverflow)
JPH02110668U (enrdf_load_stackoverflow)
JPH0389161U (enrdf_load_stackoverflow)
JPS612451U (ja) 基板ホルダ装置
JPS6163831U (enrdf_load_stackoverflow)
JPS6355115U (enrdf_load_stackoverflow)
JPS63164257U (enrdf_load_stackoverflow)
JPH02140841U (enrdf_load_stackoverflow)
JPS6182315U (enrdf_load_stackoverflow)
JPS63174445U (enrdf_load_stackoverflow)
JPH0377790U (enrdf_load_stackoverflow)
JPS6214781U (enrdf_load_stackoverflow)
JPS59162961U (ja) 塗液吹き付け用ボツクス
JPS62175516U (enrdf_load_stackoverflow)
JPS63155663U (enrdf_load_stackoverflow)