JPS63167167U - - Google Patents

Info

Publication number
JPS63167167U
JPS63167167U JP5835587U JP5835587U JPS63167167U JP S63167167 U JPS63167167 U JP S63167167U JP 5835587 U JP5835587 U JP 5835587U JP 5835587 U JP5835587 U JP 5835587U JP S63167167 U JPS63167167 U JP S63167167U
Authority
JP
Japan
Prior art keywords
screen
evaporation source
vapor deposition
utility
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5835587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5835587U priority Critical patent/JPS63167167U/ja
Publication of JPS63167167U publication Critical patent/JPS63167167U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Vertical, Hearth, Or Arc Furnaces (AREA)
JP5835587U 1987-04-17 1987-04-17 Pending JPS63167167U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5835587U JPS63167167U (enrdf_load_stackoverflow) 1987-04-17 1987-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5835587U JPS63167167U (enrdf_load_stackoverflow) 1987-04-17 1987-04-17

Publications (1)

Publication Number Publication Date
JPS63167167U true JPS63167167U (enrdf_load_stackoverflow) 1988-10-31

Family

ID=30888853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5835587U Pending JPS63167167U (enrdf_load_stackoverflow) 1987-04-17 1987-04-17

Country Status (1)

Country Link
JP (1) JPS63167167U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004205134A (ja) * 2002-12-26 2004-07-22 Toho Titanium Co Ltd 電子ビーム溶解炉の覗き窓部およびその運転方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004205134A (ja) * 2002-12-26 2004-07-22 Toho Titanium Co Ltd 電子ビーム溶解炉の覗き窓部およびその運転方法

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