JPS61125171U - - Google Patents

Info

Publication number
JPS61125171U
JPS61125171U JP15467584U JP15467584U JPS61125171U JP S61125171 U JPS61125171 U JP S61125171U JP 15467584 U JP15467584 U JP 15467584U JP 15467584 U JP15467584 U JP 15467584U JP S61125171 U JPS61125171 U JP S61125171U
Authority
JP
Japan
Prior art keywords
housing
shield
vacuum
window
window member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15467584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0226937Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15467584U priority Critical patent/JPH0226937Y2/ja
Publication of JPS61125171U publication Critical patent/JPS61125171U/ja
Application granted granted Critical
Publication of JPH0226937Y2 publication Critical patent/JPH0226937Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15467584U 1984-10-13 1984-10-13 Expired JPH0226937Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15467584U JPH0226937Y2 (enrdf_load_stackoverflow) 1984-10-13 1984-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15467584U JPH0226937Y2 (enrdf_load_stackoverflow) 1984-10-13 1984-10-13

Publications (2)

Publication Number Publication Date
JPS61125171U true JPS61125171U (enrdf_load_stackoverflow) 1986-08-06
JPH0226937Y2 JPH0226937Y2 (enrdf_load_stackoverflow) 1990-07-20

Family

ID=30712667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15467584U Expired JPH0226937Y2 (enrdf_load_stackoverflow) 1984-10-13 1984-10-13

Country Status (1)

Country Link
JP (1) JPH0226937Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101490423B1 (ko) * 2008-02-15 2015-02-09 엘아이지에이디피 주식회사 플라즈마 처리장치 및 그에 구비되는 뷰 포트

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101490423B1 (ko) * 2008-02-15 2015-02-09 엘아이지에이디피 주식회사 플라즈마 처리장치 및 그에 구비되는 뷰 포트

Also Published As

Publication number Publication date
JPH0226937Y2 (enrdf_load_stackoverflow) 1990-07-20

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