JPS6198832U - - Google Patents

Info

Publication number
JPS6198832U
JPS6198832U JP18479384U JP18479384U JPS6198832U JP S6198832 U JPS6198832 U JP S6198832U JP 18479384 U JP18479384 U JP 18479384U JP 18479384 U JP18479384 U JP 18479384U JP S6198832 U JPS6198832 U JP S6198832U
Authority
JP
Japan
Prior art keywords
plasma processing
vacuum
vacuum pump
processing chamber
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18479384U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18479384U priority Critical patent/JPS6198832U/ja
Publication of JPS6198832U publication Critical patent/JPS6198832U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP18479384U 1984-12-04 1984-12-04 Pending JPS6198832U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18479384U JPS6198832U (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18479384U JPS6198832U (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Publications (1)

Publication Number Publication Date
JPS6198832U true JPS6198832U (enrdf_load_stackoverflow) 1986-06-24

Family

ID=30742276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18479384U Pending JPS6198832U (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Country Status (1)

Country Link
JP (1) JPS6198832U (enrdf_load_stackoverflow)

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