JPS6198830U - - Google Patents

Info

Publication number
JPS6198830U
JPS6198830U JP18287084U JP18287084U JPS6198830U JP S6198830 U JPS6198830 U JP S6198830U JP 18287084 U JP18287084 U JP 18287084U JP 18287084 U JP18287084 U JP 18287084U JP S6198830 U JPS6198830 U JP S6198830U
Authority
JP
Japan
Prior art keywords
plasma processing
processed
processing chamber
resin molded
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18287084U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18287084U priority Critical patent/JPS6198830U/ja
Publication of JPS6198830U publication Critical patent/JPS6198830U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP18287084U 1984-11-30 1984-11-30 Pending JPS6198830U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18287084U JPS6198830U (enrdf_load_stackoverflow) 1984-11-30 1984-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18287084U JPS6198830U (enrdf_load_stackoverflow) 1984-11-30 1984-11-30

Publications (1)

Publication Number Publication Date
JPS6198830U true JPS6198830U (enrdf_load_stackoverflow) 1986-06-24

Family

ID=30740403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18287084U Pending JPS6198830U (enrdf_load_stackoverflow) 1984-11-30 1984-11-30

Country Status (1)

Country Link
JP (1) JPS6198830U (enrdf_load_stackoverflow)

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