JPS619838U - Brush scrubbing equipment for semiconductor wafers - Google Patents

Brush scrubbing equipment for semiconductor wafers

Info

Publication number
JPS619838U
JPS619838U JP9257784U JP9257784U JPS619838U JP S619838 U JPS619838 U JP S619838U JP 9257784 U JP9257784 U JP 9257784U JP 9257784 U JP9257784 U JP 9257784U JP S619838 U JPS619838 U JP S619838U
Authority
JP
Japan
Prior art keywords
brush
semiconductor wafers
liquid tank
brush scrubbing
scrubbing equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9257784U
Other languages
Japanese (ja)
Inventor
隆 岡部
Original Assignee
株式会社東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東芝 filed Critical 株式会社東芝
Priority to JP9257784U priority Critical patent/JPS619838U/en
Publication of JPS619838U publication Critical patent/JPS619838U/en
Pending legal-status Critical Current

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  • Cleaning In General (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの考案の１実施例のブラシスクラブ装置の概
略を示す斜視図、第２図はブラシヘッドの斜視図、第３
図はスピンステーションの斜視図、第４図は装置各部の
動作指揮系統の一部を示す線図、第５図は従来の装置を
示す断面図である。 １，１１・・・液槽、２，１２・・・エヤシリンダ（昇
降機構）、３−・・ブラシヘッド、４．６・・・キャリ
ャステーション、７ａ，１７ａ・・・液槽の給液手段、
７ｂ，１７ｂ・・・液槽の排液手段、１００・・・ウェ
ーハ、１０１ａ，１０１ｂ・・・ブラシ。Fig. 1 is a perspective view schematically showing a brush scrubbing device according to an embodiment of the invention, Fig. 2 is a perspective view of a brush head, and Fig.
This figure is a perspective view of the spin station, FIG. 4 is a line diagram showing a part of the operational command system of each part of the device, and FIG. 5 is a sectional view showing a conventional device. 1, 11...Liquid tank, 2, 12...Air cylinder (elevating mechanism), 3-...Brush head, 4.6...Carrier station, 7a, 17a...Liquid supply means for liquid tank ,
7b, 17b... Liquid draining means for the liquid tank, 100... Wafer, 101a, 101b... Brush.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 洗浄液の給排手段を有する液槽と、対のローラ型ブラシ
を水平かつ両ブラシ面を接触させて配置されたブラシヘ
ッドと、前記ブラシヘッドにおけるブラシ面の接触面間
に半導体ウエーハを挿入できる位置まて液槽を下降させ
、またブラシヘッドを液面下にあらしめる位置まで液槽
を上昇させる液槽の昇降機構とを具備した半導体ウエー
ハ用ブラシスクラブ装置。A liquid tank having cleaning liquid supply and discharge means, a brush head in which a pair of roller type brushes are arranged horizontally with both brush surfaces in contact, and a position where a semiconductor wafer can be inserted between the contact surfaces of the brush surfaces of the brush head. A brush scrubbing device for semiconductor wafers is provided with a liquid tank elevating mechanism that lowers the liquid tank and raises the liquid tank to a position where the brush head is below the liquid surface.
JP9257784U 1984-06-22 1984-06-22 Brush scrubbing equipment for semiconductor wafers Pending JPS619838U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9257784U JPS619838U (en) 1984-06-22 1984-06-22 Brush scrubbing equipment for semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9257784U JPS619838U (en) 1984-06-22 1984-06-22 Brush scrubbing equipment for semiconductor wafers

Publications (1)

Publication Number Publication Date
JPS619838U true JPS619838U (en) 1986-01-21

Family

ID=30649497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9257784U Pending JPS619838U (en) 1984-06-22 1984-06-22 Brush scrubbing equipment for semiconductor wafers

Country Status (1)

Country Link
JP (1) JPS619838U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0438291A (en) * 1990-05-31 1992-02-07 Niigata Eng Co Ltd Emergency shutdown device for shipping

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0438291A (en) * 1990-05-31 1992-02-07 Niigata Eng Co Ltd Emergency shutdown device for shipping

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