JPS6197951A - 半導体チツプの冷却装置 - Google Patents

半導体チツプの冷却装置

Info

Publication number
JPS6197951A
JPS6197951A JP21831784A JP21831784A JPS6197951A JP S6197951 A JPS6197951 A JP S6197951A JP 21831784 A JP21831784 A JP 21831784A JP 21831784 A JP21831784 A JP 21831784A JP S6197951 A JPS6197951 A JP S6197951A
Authority
JP
Japan
Prior art keywords
semiconductor chip
cooling
liquid
heat transfer
cooling plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21831784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0570940B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shigeki Hirasawa
茂樹 平沢
Hisashi Nakayama
中山　恒
Tadakatsu Nakajima
忠克 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP21831784A priority Critical patent/JPS6197951A/ja
Publication of JPS6197951A publication Critical patent/JPS6197951A/ja
Publication of JPH0570940B2 publication Critical patent/JPH0570940B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427—Cooling by change of state, e.g. use of heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
JP21831784A 1984-10-19 1984-10-19 半導体チツプの冷却装置 Granted JPS6197951A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21831784A JPS6197951A (ja) 1984-10-19 1984-10-19 半導体チツプの冷却装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21831784A JPS6197951A (ja) 1984-10-19 1984-10-19 半導体チツプの冷却装置

Publications (2)

Publication Number Publication Date
JPS6197951A true JPS6197951A (ja) 1986-05-16
JPH0570940B2 JPH0570940B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-06

Family

ID=16717952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21831784A Granted JPS6197951A (ja) 1984-10-19 1984-10-19 半導体チツプの冷却装置

Country Status (1)

Country Link
JP (1) JPS6197951A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114597A (ja) * 1988-10-24 1990-04-26 Fujikura Ltd 電子素子の冷却方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114597A (ja) * 1988-10-24 1990-04-26 Fujikura Ltd 電子素子の冷却方法

Also Published As

Publication number Publication date
JPH0570940B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-06

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees