JPS6197842U - - Google Patents

Info

Publication number
JPS6197842U
JPS6197842U JP1985187565U JP18756585U JPS6197842U JP S6197842 U JPS6197842 U JP S6197842U JP 1985187565 U JP1985187565 U JP 1985187565U JP 18756585 U JP18756585 U JP 18756585U JP S6197842 U JPS6197842 U JP S6197842U
Authority
JP
Japan
Prior art keywords
wafer
wafers
basket
storage container
rotary table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985187565U
Other languages
English (en)
Japanese (ja)
Other versions
JPS629727Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985187565U priority Critical patent/JPS629727Y2/ja
Publication of JPS6197842U publication Critical patent/JPS6197842U/ja
Application granted granted Critical
Publication of JPS629727Y2 publication Critical patent/JPS629727Y2/ja
Expired legal-status Critical Current

Links

JP1985187565U 1985-12-05 1985-12-05 Expired JPS629727Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985187565U JPS629727Y2 (cg-RX-API-DMAC7.html) 1985-12-05 1985-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985187565U JPS629727Y2 (cg-RX-API-DMAC7.html) 1985-12-05 1985-12-05

Publications (2)

Publication Number Publication Date
JPS6197842U true JPS6197842U (cg-RX-API-DMAC7.html) 1986-06-23
JPS629727Y2 JPS629727Y2 (cg-RX-API-DMAC7.html) 1987-03-06

Family

ID=30745026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985187565U Expired JPS629727Y2 (cg-RX-API-DMAC7.html) 1985-12-05 1985-12-05

Country Status (1)

Country Link
JP (1) JPS629727Y2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016213459A (ja) * 2015-04-30 2016-12-15 環球晶圓股▲ふん▼有限公司 ウエハ移し換え装置及びウエハ移し換え方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016213459A (ja) * 2015-04-30 2016-12-15 環球晶圓股▲ふん▼有限公司 ウエハ移し換え装置及びウエハ移し換え方法

Also Published As

Publication number Publication date
JPS629727Y2 (cg-RX-API-DMAC7.html) 1987-03-06

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