JPS6197834U - - Google Patents

Info

Publication number
JPS6197834U
JPS6197834U JP18418784U JP18418784U JPS6197834U JP S6197834 U JPS6197834 U JP S6197834U JP 18418784 U JP18418784 U JP 18418784U JP 18418784 U JP18418784 U JP 18418784U JP S6197834 U JPS6197834 U JP S6197834U
Authority
JP
Japan
Prior art keywords
cooling cover
transparent cooling
processing chamber
ultraviolet lamp
accommodates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18418784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452992Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984184187U priority Critical patent/JPH0452992Y2/ja
Publication of JPS6197834U publication Critical patent/JPS6197834U/ja
Application granted granted Critical
Publication of JPH0452992Y2 publication Critical patent/JPH0452992Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1984184187U 1984-12-04 1984-12-04 Expired JPH0452992Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984184187U JPH0452992Y2 (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984184187U JPH0452992Y2 (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Publications (2)

Publication Number Publication Date
JPS6197834U true JPS6197834U (enrdf_load_stackoverflow) 1986-06-23
JPH0452992Y2 JPH0452992Y2 (enrdf_load_stackoverflow) 1992-12-14

Family

ID=30741672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984184187U Expired JPH0452992Y2 (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Country Status (1)

Country Link
JP (1) JPH0452992Y2 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51140574A (en) * 1975-05-30 1976-12-03 Hitachi Ltd Method of cleaning silicon substrate plate
JPS5861831A (ja) * 1981-10-07 1983-04-13 Toshiba Electric Equip Corp 光照射装置
JPS59124124A (ja) * 1982-12-29 1984-07-18 Fujitsu Ltd 半導体装置の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51140574A (en) * 1975-05-30 1976-12-03 Hitachi Ltd Method of cleaning silicon substrate plate
JPS5861831A (ja) * 1981-10-07 1983-04-13 Toshiba Electric Equip Corp 光照射装置
JPS59124124A (ja) * 1982-12-29 1984-07-18 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0452992Y2 (enrdf_load_stackoverflow) 1992-12-14

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