JPS6196546U - - Google Patents
Info
- Publication number
- JPS6196546U JPS6196546U JP18135884U JP18135884U JPS6196546U JP S6196546 U JPS6196546 U JP S6196546U JP 18135884 U JP18135884 U JP 18135884U JP 18135884 U JP18135884 U JP 18135884U JP S6196546 U JPS6196546 U JP S6196546U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- stop position
- wafer
- conveyor belt
- detects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Description
第１図ａ，ｂは本考案による実施例の構成を示
すもので、ａは平面図、ｂは正面図、第２図ａは
ウエーハ検出センサーがウエーハを検出した時の
平面図、ｂはウエーハが測定位置で停止した時の
平面図、第３図ａ，ｂはウエーハの移動速度とウ
エーハの移動量との関係を示した図で、ａは従来
の方式による関係図、ｂは本考案による関係を示
す図である。
１…シリコンウエーハ、２…搬送ベルト、３…
ステツピングモーター、４…ウエーハ検出センサ
、５および６…測定器のプローブ、７…プーリー
、８…コントローラー、９…ウエーハ検出信号、
１０…駆動信号、１１…減速停止信号。
Figures 1a and 1b show the configuration of an embodiment according to the present invention, where a is a plan view, b is a front view, Figure 2a is a plan view when the wafer detection sensor detects a wafer, and b is a wafer Fig. 3a and b are diagrams showing the relationship between the wafer moving speed and the wafer moving amount, where a is the relationship diagram based on the conventional method, and b is the diagram based on the present invention. It is a figure showing a relationship. 1... Silicon wafer, 2... Conveyor belt, 3...
Stepping motor, 4... Wafer detection sensor, 5 and 6... Measuring instrument probe, 7... Pulley, 8... Controller, 9... Wafer detection signal,
10... Drive signal, 11... Deceleration stop signal.
Claims (1)
送ベルトを駆動するステツピングモーターと、シ
リコンウエーハの停止位置手前でシリコンウエー
ハを検出するセンサーと、該センサーのウエーハ
検出信号に基いて停止位置の手前より等減速度で
ステツピングモーターを減速させつつ、該モータ
ーの駆動をシリコンウエーハの停止位置で停止さ
せるコントローラーとを有することを特徴とする
シリコンウエーハの位置決め装置。 A conveyor belt that conveys the silicon wafer, a stepping motor that drives the conveyor belt, a sensor that detects the silicon wafer before the silicon wafer stop position, and a wafer detection signal from the sensor that detects the silicon wafer at an equal distance from before the stop position. 1. A silicon wafer positioning device comprising: a controller that decelerates the stepping motor and stops the motor at a silicon wafer stop position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18135884U JPS6196546U (en) | 1984-11-29 | 1984-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18135884U JPS6196546U (en) | 1984-11-29 | 1984-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196546U true JPS6196546U (en) | 1986-06-21 |
Family
ID=30738908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18135884U Pending JPS6196546U (en) | 1984-11-29 | 1984-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196546U (en) |
-
1984
- 1984-11-29 JP JP18135884U patent/JPS6196546U/ja active Pending
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