JPS6196538U - - Google Patents
Info
- Publication number
- JPS6196538U JPS6196538U JP18080084U JP18080084U JPS6196538U JP S6196538 U JPS6196538 U JP S6196538U JP 18080084 U JP18080084 U JP 18080084U JP 18080084 U JP18080084 U JP 18080084U JP S6196538 U JPS6196538 U JP S6196538U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- air
- gas
- fixing surface
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Valve Housings (AREA)
- Multiple-Way Valves (AREA)
- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18080084U JPH0442913Y2 (un) | 1984-11-30 | 1984-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18080084U JPH0442913Y2 (un) | 1984-11-30 | 1984-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6196538U true JPS6196538U (un) | 1986-06-21 |
| JPH0442913Y2 JPH0442913Y2 (un) | 1992-10-12 |
Family
ID=30738357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18080084U Expired JPH0442913Y2 (un) | 1984-11-30 | 1984-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0442913Y2 (un) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01281138A (ja) * | 1988-05-08 | 1989-11-13 | Tadahiro Omi | プロセスガス供給配管装置 |
| JPH0221618A (ja) * | 1988-07-08 | 1990-01-24 | Tadahiro Omi | プロセス装置用ガス供給配管装置 |
| JPH11141713A (ja) * | 1997-09-05 | 1999-05-28 | Tetra Laval Holdings & Finance Sa | 無菌弁組立体 |
| JP2019157888A (ja) * | 2018-03-07 | 2019-09-19 | 株式会社Ｓｃｒｅｅｎホールディングス | 薬液制御弁および基板処理装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060060253A1 (en) * | 2002-10-21 | 2006-03-23 | Ckd Corporation | Integrated gas valve |
-
1984
- 1984-11-30 JP JP18080084U patent/JPH0442913Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01281138A (ja) * | 1988-05-08 | 1989-11-13 | Tadahiro Omi | プロセスガス供給配管装置 |
| JPH0221618A (ja) * | 1988-07-08 | 1990-01-24 | Tadahiro Omi | プロセス装置用ガス供給配管装置 |
| JPH11141713A (ja) * | 1997-09-05 | 1999-05-28 | Tetra Laval Holdings & Finance Sa | 無菌弁組立体 |
| JP2019157888A (ja) * | 2018-03-07 | 2019-09-19 | 株式会社Ｓｃｒｅｅｎホールディングス | 薬液制御弁および基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0442913Y2 (un) | 1992-10-12 |