JPS6194323A - Apparatus for correcting surface shape of laminar plate - Google Patents

Apparatus for correcting surface shape of laminar plate

Info

Publication number
JPS6194323A
JPS6194323A JP21514784A JP21514784A JPS6194323A JP S6194323 A JPS6194323 A JP S6194323A JP 21514784 A JP21514784 A JP 21514784A JP 21514784 A JP21514784 A JP 21514784A JP S6194323 A JPS6194323 A JP S6194323A
Authority
JP
Japan
Prior art keywords
diaphragm
surface shape
output
wafer
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21514784A
Inventor
Junji Isohata
Fumio Sakai
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP21514784A priority Critical patent/JPS6194323A/en
Priority claimed from US06/786,077 external-priority patent/US4737824A/en
Publication of JPS6194323A publication Critical patent/JPS6194323A/en
Application status is Pending legal-status Critical

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/70691Handling of masks or wafers
    • G03F7/707Chucks, e.g. chucking or un-chucking operations

Abstract

PURPOSE:To enable the surface shape of a laminar plate to be corrected, by providing a diaphragm for attracting and deforming the laminar plate, means for determining the surface shape and means for controlling the driving of the diaphragm. CONSTITUTION:A wafer is disposed on a wafer chuck body 2 and is attracted to the body 2 and a diaphragm 5 by means of vacuum grooves 22 and 52. The surface shape of the wafer 1 is determined by a flatness measuring device 9, output of which is supplied to an arithmetic circuit 12. The arithmetic circuit 12 computes a difference between said output and a shape data from a commanding section 8, and the output thereof is supplied to a driving section 7. The driving section 7 controls the pressure to be supplied to the diaphragm 5 in accordance with the computation output such that the diaphragm 5 is deformed for displacing the working surface 51 of the diaphragm. In this manner, the surface shape of the wafer 1 can be corrected to either flat or curved as required.
JP21514784A 1984-10-16 1984-10-16 Apparatus for correcting surface shape of laminar plate Pending JPS6194323A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21514784A JPS6194323A (en) 1984-10-16 1984-10-16 Apparatus for correcting surface shape of laminar plate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP21514784A JPS6194323A (en) 1984-10-16 1984-10-16 Apparatus for correcting surface shape of laminar plate
US06/786,077 US4737824A (en) 1984-10-16 1985-10-10 Surface shape controlling device

Publications (1)

Publication Number Publication Date
JPS6194323A true JPS6194323A (en) 1986-05-13

Family

ID=16667452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21514784A Pending JPS6194323A (en) 1984-10-16 1984-10-16 Apparatus for correcting surface shape of laminar plate

Country Status (1)

Country Link
JP (1) JPS6194323A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012507138A (en) * 2008-10-23 2012-03-22 モレキュラー・インプリンツ・インコーポレーテッド Imprint lithography apparatus, and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012507138A (en) * 2008-10-23 2012-03-22 モレキュラー・インプリンツ・インコーポレーテッド Imprint lithography apparatus, and method

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