JPS6192458A - Optical recording medium - Google Patents

Optical recording medium

Info

Publication number
JPS6192458A
JPS6192458A JP21144184A JP21144184A JPS6192458A JP S6192458 A JPS6192458 A JP S6192458A JP 21144184 A JP21144184 A JP 21144184A JP 21144184 A JP21144184 A JP 21144184A JP S6192458 A JPS6192458 A JP S6192458A
Authority
JP
Japan
Prior art keywords
layer
film
optical recording
substrate
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21144184A
Other languages
Japanese (ja)
Inventor
Kazuoki Motomiya
一興 本宮
Mitsuharu Sawamura
光治 沢村
Kazuhiko Kikuchi
一彦 菊池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP21144184A priority Critical patent/JPS6192458A/en
Publication of JPS6192458A publication Critical patent/JPS6192458A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers

Abstract

PURPOSE:To improve the adhesiveness to a substrate, more particularly plastic substrate and corrosion resistance by providing a film which does not contain oxygen in the film itself and consists of a boride having excellent moisture resistance on one or both sides of a recording layer. CONSTITUTION:The film consisting of the boride may be provided between at least an undercoating layer and optical recording layer and may be provided on both sides of the optical recording layer. Any among Mo-B, Nb-B, Ta-B, Ti-B, W-B, Zr-B, Cr-B and Si-B is used for the film consisting of the boride and the film thickness thereof is suitably 150-2,000Angstrom . The optical recording medium is obtd. by forming an undercoating layer 2 consisting of an SiO film on the substrate 1a on the writing side, providing successively a boride film 7, an optical recording layer 3, a spacer layer 4 and a reflecting layer 5 and providing further a protective layer 9 and adhering the laminate via an adhesive layer 6 to a substrate 1b for protection. The substrate 1a on the writing side which is transparent to used light is usable and glass and plastic such as acrylic resin are usable. Glass and plastic are used for the substrate 1b.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、光ビームにより記録・再生を行うことが可能
な光学的記録媒体に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical recording medium on which recording and reproduction can be performed using a light beam.

〔従来の技術〕[Conventional technology]

従来より、光ディスクに用いられる光学的記録媒体とし
ては希土類−遷移金属の合金薄膜、非晶質から結晶質へ
の相転移を利用したカルコゲン化合物等の還元性酸化物
薄膜、ヒートモード記録媒体、サーモプラスチック記録
媒体等が知られている。例えば、希土類−遷移金属の合
金薄膜で形成される光磁気記録媒体としては、MtIB
i 、 MnCuB1などの多結晶薄膜、GdCo 、
 GdFe 、 TbFe 、 DyFe 。
Conventionally, optical recording media used in optical disks include rare earth-transition metal alloy thin films, reducing oxide thin films such as chalcogen compounds that utilize phase transition from amorphous to crystalline, heat mode recording media, and thermostats. Plastic recording media and the like are known. For example, as a magneto-optical recording medium formed of a rare earth-transition metal alloy thin film, MtIB
i, polycrystalline thin films such as MnCuB1, GdCo,
GdFe, TbFe, DyFe.

GdTbFe 、 TbDyFe 、 GdFe、Co
 、 TbFeCo 、 GdTbCoなどの非晶質薄
膜、GdIGなどの単結晶薄膜などが知られている。
GdTbFe, TbDyFe, GdFe, Co
Amorphous thin films such as , TbFeCo, and GdTbCo, and single crystal thin films such as GdIG are known.

これらの薄膜のうち、大面積の薄膜を室温近傍の温度で
製作する際の成膜性、信号を小さな光熱エネルギーで書
き込むだめの書き込み効率、および書き込まれた信号を
S/N比よく読み出すだめの読み出し効率等を勘案して
、最近では前記非晶質薄膜が光磁気記録媒体用として優
れていると考えられている。特に、150〜200℃程
度のキューリ一温度を持つGdTbFeやカー回転角が
大きく再生性能に優れたGdTbFeCo (特開昭5
8−196639)等が光磁気記録媒体用として最適で
ある。
Among these thin films, the film-forming properties of large-area thin films at temperatures near room temperature, the writing efficiency of writing signals with small photothermal energy, and the ability of reading written signals with a good S/N ratio are important. In consideration of read efficiency and the like, the amorphous thin film has recently been considered to be excellent for use in magneto-optical recording media. In particular, GdTbFe has a Curie temperature of about 150 to 200°C, and GdTbFeCo has a large Kerr rotation angle and excellent playback performance.
8-196639) etc. are most suitable for magneto-optical recording media.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかしながら、一般に前記GdTbFe等の光磁気記録
媒体をはじめとする磁気記録媒体に用いられる非晶質磁
性体は、耐食性が悪いという欠点を持っている。すなわ
ち、大気、水蒸気に触れると磁気特性が低下し、最終的
には完全に酸化されて透開化するに至る。
However, amorphous magnetic materials used in magnetic recording media, including magneto-optical recording media such as GdTbFe, generally have a drawback of poor corrosion resistance. That is, when it comes into contact with air or water vapor, its magnetic properties deteriorate, and eventually it becomes completely oxidized and becomes transparent.

このような欠点を除くために、従来から光学的記録層の
上に各種の保護層、例えばSiO□、 Sin。
In order to eliminate such drawbacks, various protective layers such as SiO□ and Sin have been conventionally applied on the optical recording layer.

Al2O2など透明物質の保護層を設けたり、さらに不
活性ガスにより封じ込めたディスク状記録媒体が提案さ
れている。
Disc-shaped recording media have been proposed that are provided with a protective layer of a transparent material such as Al2O2 or further sealed with an inert gas.

このような従来の光学的記録媒体の一例を第6図に示す
。書き込み側基板1a上にSin、5in2の下引き層
2を形成し、光学的記録層6、ス、?−サ層4、反射層
5、接着層6を介して、保護用基板1bと貼り合わせて
得られる。
An example of such a conventional optical recording medium is shown in FIG. An undercoat layer 2 of Sin, 5in2 is formed on the writing side substrate 1a, and an optical recording layer 6, S, ? - Obtained by bonding to the protective substrate 1b via the protective layer 4, the reflective layer 5, and the adhesive layer 6.

しかし、この構成でも保護層或いは下引き層等の補助層
からの酸素、水分のしみ出しにより記録層が酸化される
という問題があり、記録特性が劣化し、十分な耐食性は
得られなかった。
However, even with this configuration, there is a problem that the recording layer is oxidized due to seepage of oxygen and moisture from the auxiliary layer such as the protective layer or the undercoat layer, resulting in deterioration of recording characteristics and failure to obtain sufficient corrosion resistance.

また、下引き層2として、はう化物単独の膜を用いると
、プラスチック基板に対して、密着力が弱く、クラック
が生じやすいという欠点があった。
Further, when a film containing only a ferride is used as the undercoat layer 2, there is a drawback that the adhesion to the plastic substrate is weak and cracks are likely to occur.

あり、  、−、−11+1 ゛−−− 優れた光学的記録媒体を提供することを目的とする。Yes, -, -11+1 ゛--- The purpose is to provide excellent optical recording media.

〔問題点を解決するだめの手段〕[Failure to solve the problem]

本発明の目的は、以下の光学的記録媒体によって達成さ
れる。
The object of the invention is achieved by the following optical recording medium.

すなわち、基板に相接してSiOからなる下引き層が設
けてあり、少なくとも該下引き層と光学的記録層の間に
ほう化物の膜を有することを特徴とする光学的記録媒体
である。
That is, the optical recording medium is characterized in that an undercoat layer made of SiO is provided adjacent to a substrate, and a boride film is provided at least between the undercoat layer and the optical recording layer.

はう化物の膜は、少なくとも下引き層と光学的記録層の
間に設けられれば、本発明の目的を達成することができ
るが、光学的記録層の両側C(設けられてもよい。
The object of the present invention can be achieved if the sterilized film is provided at least between the undercoat layer and the optical recording layer, but it may also be provided on both sides C of the optical recording layer.

前記はう化物の膜は、M □ −B系、Nb−B系、T
a−B系、Ti−B系、V−B系、W−B系、Zr B
系、Ca−B系、Hf−B系、Cr−B系、S i−B
系のなかから 用いられるっ 該はう化物の膜厚は150X〜2000Xが適している
。1soXより薄いと十分な保護効果が得られず200
0Aより厚いと記録感度が低下したり、亀裂等が生じて
好ましくない。本発明の光学的記録媒体の実施態様を第
1図に示す。
The above-mentioned poride film is composed of M □ -B system, Nb-B system, T
a-B system, Ti-B system, V-B system, W-B system, Zr B
system, Ca-B system, Hf-B system, Cr-B system, Si-B
The film thickness of the hydride used in the system is preferably 150X to 2000X. If it is thinner than 1soX, sufficient protection cannot be obtained;
If it is thicker than 0A, the recording sensitivity will decrease and cracks will occur, which is not preferable. An embodiment of the optical recording medium of the present invention is shown in FIG.

第1図の光学的記録媒体は、書き込み側基板1a上にS
iO膜の下引き層2を形成せしめ、順次はう化物膜7、
光学的記録層6、スズーサ層4、反射層5を設け、さら
に保護層9を設は接着層6を介して、保護用基板1bと
貼り合わせることにより得られる。
The optical recording medium shown in FIG.
A subbing layer 2 of an iO film is formed, and a poride film 7,
The optical recording layer 6, the sintering layer 4, and the reflective layer 5 are provided, and the protective layer 9 is further provided by bonding the protective layer 1b to the protective substrate 1b via the adhesive layer 6.

1aの書き込み側基板としては、使用光に対しきる1゜ 乙の光学的記録層としては、例えば各種の非晶質磁性薄
膜を使用できる。この非晶質磁性薄膜として、GdCo
、GdFe 、TbFe、DyFe、GdTbFe。
As the write-side substrate 1a, various amorphous magnetic thin films can be used, for example, as an optical recording layer having an angle of 1° with respect to the light used. As this amorphous magnetic thin film, GdCo
, GdFe, TbFe, DyFe, GdTbFe.

TbDyFe等の非晶質磁性薄膜が好ましい。なかでも
、Gd Tb Fe 、 Gd Tb Fe Coはカ
ー回転角が大きいので特に、好捷しい。
An amorphous magnetic thin film such as TbDyFe is preferred. Among them, Gd Tb Fe and Gd Tb Fe Co are particularly preferable because they have a large Kerr rotation angle.

非晶質磁性薄膜の層厚は記録層としての機能を果す範囲
内の所望の層厚に形成されるが通常160〜10001
程度である。記録再生感度を向上させるにば160A程
度が望ましい。
The layer thickness of the amorphous magnetic thin film is formed to a desired layer thickness within the range that functions as a recording layer, but is usually 160 to 10,000 mm.
That's about it. In order to improve the recording/reproducing sensitivity, it is desirable that the current be about 160A.

4のスズーサ一層としては、5IOISiO2などの酸
化ケイ素膜、AlN、Si、N4などの窒化膜、或いは
SiCのような炭化膜、或いは本発明のようなホウ化物
の膜などを使用できる。スは−サ一層の膜厚は500〜
3000Aが適している。
A silicon oxide film such as 5IOISiO2, a nitride film such as AlN, Si, or N4, a carbide film such as SiC, or a boride film such as the one of the present invention can be used as the single layer of the layer 4. The thickness of the single layer is 500~
3000A is suitable.

5の反射層としては、AlあるいはCuを用いることが
できる。膜厚は400〜1000Aが適している。
As the reflective layer 5, Al or Cu can be used. A film thickness of 400 to 1000A is suitable.

保護層9としてはSin、5i02等を用いることが出
来、その膜厚は500〜2000)〜が適しているっ6
の接着層としては、シリコーン系接着剤、例えば東しシ
リコーン■製5E1700々どが、10μm程度の厚さ
で用いられる。
As the protective layer 9, a material such as Sin, 5i02, etc. can be used, and its film thickness is suitably 500 to 2000 mm).
As the adhesive layer, a silicone adhesive such as 5E1700 manufactured by Toshi Silicone ■ is used with a thickness of about 10 μm.

1bの保護用基板としては、ガラス、プラスチックなど
が用いられる。
As the protective substrate 1b, glass, plastic, etc. are used.

スに一す一層、反射層、保護層、接着層、保護用基板は
、必要に応じ設けても設けなくてもよい。
A reflective layer, a protective layer, an adhesive layer, and a protective substrate may or may not be provided as necessary.

又、他の補助層を設けてもよい。Other auxiliary layers may also be provided.

第1図には貼り合わせ構造の光学的記録媒体を示したが
、不活性ガスを封じ込めたエアーサンドイッチ構造であ
ってもよい。
Although FIG. 1 shows an optical recording medium having a laminated structure, it may also have an air sandwich structure in which an inert gas is sealed.

〔実施例〕〔Example〕

本発明を更に具体的に説明するために、以下に実施例を
示す。
EXAMPLES In order to explain the present invention more specifically, Examples are shown below.

実施例1 第1図に示す構造の光磁気記録媒体を以下のように製造
したつ アクリル材の1.2朋厚の7°ラスチツク基板1a上に
下引き層2として1000AのSiO膜を形成し、はう
化物の膜7として500AのB、 S i膜をスパッタ
リングにより形成した。その上に高周波スパッタによI
)GdTbFeCoを膜厚200Aに成膜し9、磁性膜
より成る記録層6を形成した。更にスは−サ層4として
、約70OAのSiO膜反射層5として、約500Aの
A7膜を蒸着し、保護層9として2000AのSiO膜
を設け、接着層6としてシリコン系接着剤(東しシリコ
ーン■製:5E1700)を10ノ1m厚にスクリーン
印刷し、保護用プラスチック基板1bと貼り合わせて光
磁気記録媒体としだ。
Example 1 A magneto-optical recording medium having the structure shown in FIG. 1 was manufactured as follows. A 1000A SiO film was formed as an undercoat layer 2 on a 7° plastic substrate 1a made of acrylic material and having a thickness of 1.2 mm. A B, Si film of 500 Å was formed as the fertilized film 7 by sputtering. On top of that, I
) A GdTbFeCo film was formed to a thickness of 200 Å 9 to form a recording layer 6 made of a magnetic film. Furthermore, an SiO film of approximately 70 OA was deposited as the thermal layer 4, an A7 film of approximately 500 Å was deposited as the reflective layer 5, an SiO film of 2,000 Å was deposited as the protective layer 9, and a silicon adhesive (Toshiba) was deposited as the adhesive layer 6. Silicone (made by ■: 5E1700) was screen printed to a thickness of 10 mm and bonded to a protective plastic substrate 1b to form a magneto-optical recording medium.

得られた記録媒体のカー回転角θに、保磁力Hcの測定
とともに、温度45℃、相対湿度95係の恒温恒湿槽に
て500時間の耐湿テストを行なった。
The obtained recording medium was subjected to a 500-hour humidity test in a constant temperature and humidity chamber at a temperature of 45° C. and a relative humidity of 95 degrees, in addition to measuring the coercive force Hc at the Kerr rotation angle θ.

比較のため保護層7を設けない他は、同様の構成を有す
る記録媒体を同様にして製造し、同時に試験を行なった
For comparison, a recording medium having the same structure except that the protective layer 7 was not provided was manufactured in the same manner and tested at the same time.

結果は第1表に示すとおりで、本発明の光磁気記録媒体
は、磁気特性の劣化も認められず、耐久性が向上した。
The results are shown in Table 1, and the magneto-optical recording medium of the present invention showed no deterioration in magnetic properties and improved durability.

実施例2 実施例10B、 S i膜の代りにCrB2膜を保護層
2として設け、さらに記録層6とスは−サ一層4との間
に保護層8として200AのCrB2膜を設けて、第2
図示構成のような媒体を作製した。
Example 2 In Example 10B, a CrB2 film was provided as the protective layer 2 instead of the Si film, and a 200A CrB2 film was provided as the protective layer 8 between the recording layer 6 and the silicon layer 4. 2
A medium having the configuration shown in the figure was prepared.

実施例1と同様、カー回転角θk、保磁力ICの測定と
ともに、温度45℃、相対湿度95係の恒温恒湿槽にお
ける耐久500時間の耐湿テストを行なった。
As in Example 1, in addition to measuring the Kerr rotation angle θk and coercive force IC, a 500-hour humidity test was conducted in a constant temperature and humidity chamber at a temperature of 45° C. and a relative humidity of 95 degrees.

結果は第1表に示した通りで、耐久性を向上させること
ができた。尚、第1表の数値は初期値を1.0とした場
合の比率で示した。
The results are shown in Table 1, indicating that durability could be improved. In addition, the numerical values in Table 1 are shown as ratios when the initial value is 1.0.

第  1  表 〔発明の効果〕 本発明の光学的記録媒体においては、記録層が例えば約
数百Aの厚さの磁性層であっても片側又は両側に膜自体
に酸素を含まない耐湿性のすぐれたほう化物の膜を設け
ることにより、基板特にプラスチック基板との密着性に
優れた、耐腐食性に優れた光学的記録媒体の提供が可能
である。
Table 1 [Effects of the Invention] In the optical recording medium of the present invention, even if the recording layer is a magnetic layer with a thickness of about several hundred amps, a moisture-resistant film that does not contain oxygen in the film itself is coated on one or both sides. By providing an excellent boride film, it is possible to provide an optical recording medium with excellent adhesion to a substrate, especially a plastic substrate, and excellent corrosion resistance.

尚、本発明は光磁気記録媒体Vζ限定されるものでなく
、たとえばカルコゲ゛ン化合物の薄膜等、酸化され易い
記録層を有する他の光学的記録媒体の耐久性向上に関し
ても同様に効果的である0
Note that the present invention is not limited to magneto-optical recording media Vζ, and is equally effective in improving the durability of other optical recording media having recording layers that are easily oxidized, such as thin films of chalcogen compounds. Some 0

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第2図は本発明の光学的記録媒体の略断面図で
あり、第6図は従来の光学的記録媒体の略断面図である
。 1a・・・・・・・・書き込み側基板 1b・・・・・・・・・保護用基板 2・・・・・・・・・下引き層 6・・・・・・光学的記録層 4・・・・・・・・ス−s−+−1n 5・・・・・・・・・反射層 6・・・・・・・・接着層 7.8・・・・・・はう化物の膜 9・・・・・・・保護層
1 and 2 are schematic cross-sectional views of the optical recording medium of the present invention, and FIG. 6 is a schematic cross-sectional view of a conventional optical recording medium. 1a...Writing side substrate 1b...Protective substrate 2...Undercoat layer 6...Optical recording layer 4 ......S-s-+-1n 5......Reflection layer 6...Adhesive layer 7.8...Moulide Film 9...Protective layer

Claims (1)

【特許請求の範囲】[Claims] 基板に相接してSiOからなる下引き層が設けてあり、
少なくとも該下引き層と光学的記録層の間にほう化物の
膜を有することを特徴とする光学的記録媒体。
An undercoat layer made of SiO is provided adjacent to the substrate,
An optical recording medium comprising a boride film at least between the undercoat layer and the optical recording layer.
JP21144184A 1984-10-11 1984-10-11 Optical recording medium Pending JPS6192458A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21144184A JPS6192458A (en) 1984-10-11 1984-10-11 Optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21144184A JPS6192458A (en) 1984-10-11 1984-10-11 Optical recording medium

Publications (1)

Publication Number Publication Date
JPS6192458A true JPS6192458A (en) 1986-05-10

Family

ID=16606006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21144184A Pending JPS6192458A (en) 1984-10-11 1984-10-11 Optical recording medium

Country Status (1)

Country Link
JP (1) JPS6192458A (en)

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