JPS6192048U - - Google Patents
Info
- Publication number
- JPS6192048U JPS6192048U JP17769784U JP17769784U JPS6192048U JP S6192048 U JPS6192048 U JP S6192048U JP 17769784 U JP17769784 U JP 17769784U JP 17769784 U JP17769784 U JP 17769784U JP S6192048 U JPS6192048 U JP S6192048U
- Authority
- JP
- Japan
- Prior art keywords
- phase growth
- light source
- moving mechanism
- semiconductor wafer
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000001947 vapour-phase growth Methods 0.000 claims description 7
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 4
- 229910052753 mercury Inorganic materials 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000012071 phase Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17769784U JPS6192048U (enrdf_load_stackoverflow) | 1984-11-22 | 1984-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17769784U JPS6192048U (enrdf_load_stackoverflow) | 1984-11-22 | 1984-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6192048U true JPS6192048U (enrdf_load_stackoverflow) | 1986-06-14 |
Family
ID=30735267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17769784U Pending JPS6192048U (enrdf_load_stackoverflow) | 1984-11-22 | 1984-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6192048U (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5961920A (ja) * | 1982-10-01 | 1984-04-09 | Agency Of Ind Science & Technol | 薄膜製造方法およびその装置 |
-
1984
- 1984-11-22 JP JP17769784U patent/JPS6192048U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5961920A (ja) * | 1982-10-01 | 1984-04-09 | Agency Of Ind Science & Technol | 薄膜製造方法およびその装置 |
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