JPS61912B2 - - Google Patents

Info

Publication number
JPS61912B2
JPS61912B2 JP57081723A JP8172382A JPS61912B2 JP S61912 B2 JPS61912 B2 JP S61912B2 JP 57081723 A JP57081723 A JP 57081723A JP 8172382 A JP8172382 A JP 8172382A JP S61912 B2 JPS61912 B2 JP S61912B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57081723A
Other versions
JPS583985A (ja
Inventor
Henrii Dejiretsutsu Buraian
Ansonii Gansaa Toomasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS583985A publication Critical patent/JPS583985A/ja
Publication of JPS61912B2 publication Critical patent/JPS61912B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
    • B81C1/00563—Avoid or control over-etching
    • B81C1/00587—Processes for avoiding or controlling over-etching not provided for in B81C1/00571 - B81C1/00579
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0055—Manufacturing logistics
    • B81C99/0065—Process control; Yield prediction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0135—Controlling etch progression
    • B81C2201/0138—Monitoring physical parameters in the etching chamber, e.g. pressure, temperature or gas composition

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Geometry (AREA)
  • Automation & Control Theory (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP57081723A 1981-06-30 1982-05-17 反応性イオン食刻装置 Granted JPS583985A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US279127 1981-06-30
US06/279,127 US4362596A (en) 1981-06-30 1981-06-30 Etch end point detector using gas flow changes

Publications (2)

Publication Number Publication Date
JPS583985A JPS583985A (ja) 1983-01-10
JPS61912B2 true JPS61912B2 (ja) 1986-01-11

Family

ID=23067735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57081723A Granted JPS583985A (ja) 1981-06-30 1982-05-17 反応性イオン食刻装置

Country Status (4)

Country Link
US (1) US4362596A (ja)
EP (1) EP0068155B1 (ja)
JP (1) JPS583985A (ja)
DE (1) DE3265822D1 (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4345968A (en) * 1981-08-27 1982-08-24 Ncr Corporation End point detection using gas flow
US4602981A (en) * 1985-05-06 1986-07-29 International Business Machines Corporation Monitoring technique for plasma etching
JPH0711994B2 (ja) * 1989-01-24 1995-02-08 株式会社島津製作所 高周波プラズマ発生検出装置
KR0179281B1 (ko) * 1996-02-28 1999-10-01 문정환 챔버를 갖는 베이퍼-에치 장치의 에치-종말점 측정방법
JPH10240356A (ja) 1997-02-21 1998-09-11 Anelva Corp 基板処理装置の基板温度制御法と基板温度制御性判定法
US6017414A (en) 1997-03-31 2000-01-25 Lam Research Corporation Method of and apparatus for detecting and controlling in situ cleaning time of vacuum processing chambers
US6165312A (en) * 1998-04-23 2000-12-26 Sandia Corporation Method and apparatus for monitoring plasma processing operations
US6170492B1 (en) * 1998-06-15 2001-01-09 Applied Materials, Inc. Cleaning process end point determination using throttle valve position
US20050042523A1 (en) * 2003-08-20 2005-02-24 Banqiu Wu Endpoint detection of plasma-assisted etch process
DE102012202611A1 (de) * 2012-02-21 2013-08-22 Siemens Aktiengesellschaft Verfahren zum Herstellen eines Mikrosystems
WO2018182692A1 (en) * 2017-03-31 2018-10-04 Kyu Oh Lee Creating a cavity using plasma gas

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4115184A (en) * 1975-12-29 1978-09-19 Northern Telecom Limited Method of plasma etching
JPS5313967A (en) * 1976-07-26 1978-02-08 Oki Electric Ind Co Ltd Measuring method for characteristic of vibration gauge

Also Published As

Publication number Publication date
EP0068155A2 (en) 1983-01-05
JPS583985A (ja) 1983-01-10
EP0068155B1 (en) 1985-08-28
US4362596A (en) 1982-12-07
DE3265822D1 (en) 1985-10-03
EP0068155A3 (en) 1983-03-30

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