JPS6191152U - - Google Patents

Info

Publication number
JPS6191152U
JPS6191152U JP17610884U JP17610884U JPS6191152U JP S6191152 U JPS6191152 U JP S6191152U JP 17610884 U JP17610884 U JP 17610884U JP 17610884 U JP17610884 U JP 17610884U JP S6191152 U JPS6191152 U JP S6191152U
Authority
JP
Japan
Prior art keywords
sealed chamber
gas
dust
wall
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17610884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0326440Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17610884U priority Critical patent/JPH0326440Y2/ja
Publication of JPS6191152U publication Critical patent/JPS6191152U/ja
Application granted granted Critical
Publication of JPH0326440Y2 publication Critical patent/JPH0326440Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
JP17610884U 1984-11-20 1984-11-20 Expired JPH0326440Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17610884U JPH0326440Y2 (enrdf_load_stackoverflow) 1984-11-20 1984-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17610884U JPH0326440Y2 (enrdf_load_stackoverflow) 1984-11-20 1984-11-20

Publications (2)

Publication Number Publication Date
JPS6191152U true JPS6191152U (enrdf_load_stackoverflow) 1986-06-13
JPH0326440Y2 JPH0326440Y2 (enrdf_load_stackoverflow) 1991-06-07

Family

ID=30733705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17610884U Expired JPH0326440Y2 (enrdf_load_stackoverflow) 1984-11-20 1984-11-20

Country Status (1)

Country Link
JP (1) JPH0326440Y2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63208741A (ja) * 1987-02-25 1988-08-30 Tokyo Electron Ltd 発塵量測定装置
JPS63208737A (ja) * 1987-02-25 1988-08-30 Tokyo Electron Ltd 発塵量測定方法
KR101675469B1 (ko) * 2016-03-24 2016-11-14 주식회사 코스메카코리아 미세먼지를 함유한 인공대기환경 조성장치
KR20230013871A (ko) * 2021-07-20 2023-01-27 (주)미디어에버 나노파티클 검출장치의 진동저감 구조

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63208741A (ja) * 1987-02-25 1988-08-30 Tokyo Electron Ltd 発塵量測定装置
JPS63208737A (ja) * 1987-02-25 1988-08-30 Tokyo Electron Ltd 発塵量測定方法
KR101675469B1 (ko) * 2016-03-24 2016-11-14 주식회사 코스메카코리아 미세먼지를 함유한 인공대기환경 조성장치
KR20230013871A (ko) * 2021-07-20 2023-01-27 (주)미디어에버 나노파티클 검출장치의 진동저감 구조

Also Published As

Publication number Publication date
JPH0326440Y2 (enrdf_load_stackoverflow) 1991-06-07

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