JPS6191152U - - Google Patents
Info
- Publication number
- JPS6191152U JPS6191152U JP17610884U JP17610884U JPS6191152U JP S6191152 U JPS6191152 U JP S6191152U JP 17610884 U JP17610884 U JP 17610884U JP 17610884 U JP17610884 U JP 17610884U JP S6191152 U JPS6191152 U JP S6191152U
- Authority
- JP
- Japan
- Prior art keywords
- sealed chamber
- gas
- dust
- wall
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17610884U JPH0326440Y2 (OSRAM) | 1984-11-20 | 1984-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17610884U JPH0326440Y2 (OSRAM) | 1984-11-20 | 1984-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6191152U true JPS6191152U (OSRAM) | 1986-06-13 |
| JPH0326440Y2 JPH0326440Y2 (OSRAM) | 1991-06-07 |
Family
ID=30733705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17610884U Expired JPH0326440Y2 (OSRAM) | 1984-11-20 | 1984-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0326440Y2 (OSRAM) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63208737A (ja) * | 1987-02-25 | 1988-08-30 | Tokyo Electron Ltd | 発塵量測定方法 |
| JPS63208741A (ja) * | 1987-02-25 | 1988-08-30 | Tokyo Electron Ltd | 発塵量測定装置 |
| KR101675469B1 (ko) * | 2016-03-24 | 2016-11-14 | 주식회사 코스메카코리아 | 미세먼지를 함유한 인공대기환경 조성장치 |
| KR20230013871A (ko) * | 2021-07-20 | 2023-01-27 | (주)미디어에버 | 나노파티클 검출장치의 진동저감 구조 |
-
1984
- 1984-11-20 JP JP17610884U patent/JPH0326440Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63208737A (ja) * | 1987-02-25 | 1988-08-30 | Tokyo Electron Ltd | 発塵量測定方法 |
| JPS63208741A (ja) * | 1987-02-25 | 1988-08-30 | Tokyo Electron Ltd | 発塵量測定装置 |
| KR101675469B1 (ko) * | 2016-03-24 | 2016-11-14 | 주식회사 코스메카코리아 | 미세먼지를 함유한 인공대기환경 조성장치 |
| KR20230013871A (ko) * | 2021-07-20 | 2023-01-27 | (주)미디어에버 | 나노파티클 검출장치의 진동저감 구조 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0326440Y2 (OSRAM) | 1991-06-07 |
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