JPS6190486A - 放電励起型短パルスレ−ザ装置 - Google Patents

放電励起型短パルスレ−ザ装置

Info

Publication number
JPS6190486A
JPS6190486A JP21284384A JP21284384A JPS6190486A JP S6190486 A JPS6190486 A JP S6190486A JP 21284384 A JP21284384 A JP 21284384A JP 21284384 A JP21284384 A JP 21284384A JP S6190486 A JPS6190486 A JP S6190486A
Authority
JP
Japan
Prior art keywords
cathode
discharge
dielectric
laser device
pulse laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21284384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0344429B2 (enrdf_load_stackoverflow
Inventor
Takeo Haruta
春田　健雄
Hitoshi Wakata
若田　仁志
Yukio Sato
行雄 佐藤
Haruhiko Nagai
治彦 永井
Hajime Nakatani
元 中谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP21284384A priority Critical patent/JPS6190486A/ja
Priority to US06/782,568 priority patent/US4686682A/en
Priority to DE19853588118 priority patent/DE3588118T2/de
Priority to EP85112484A priority patent/EP0177888B1/en
Priority to EP93100578A priority patent/EP0542718B1/en
Priority to EP93100550A priority patent/EP0543795B1/en
Priority to DE19853588088 priority patent/DE3588088T2/de
Priority to DE3587852T priority patent/DE3587852T2/de
Priority to DE19853588137 priority patent/DE3588137T2/de
Priority to EP94114362A priority patent/EP0637106B1/en
Priority to CA000492327A priority patent/CA1259122A/en
Publication of JPS6190486A publication Critical patent/JPS6190486A/ja
Publication of JPH0344429B2 publication Critical patent/JPH0344429B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP21284384A 1984-10-09 1984-10-09 放電励起型短パルスレ−ザ装置 Granted JPS6190486A (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP21284384A JPS6190486A (ja) 1984-10-09 1984-10-09 放電励起型短パルスレ−ザ装置
US06/782,568 US4686682A (en) 1984-10-09 1985-10-01 Discharge excitation type short pulse laser device
DE19853588118 DE3588118T2 (de) 1984-10-09 1985-10-02 Entladungsangeregter Laser zur Erzeugung kurzer Pulse
EP85112484A EP0177888B1 (en) 1984-10-09 1985-10-02 Discharge excitation type short pulse laser device
EP93100578A EP0542718B1 (en) 1984-10-09 1985-10-02 Discharge excitation type short pulse laser device
EP93100550A EP0543795B1 (en) 1984-10-09 1985-10-02 Discharge excitation type short pulse laser device
DE19853588088 DE3588088T2 (de) 1984-10-09 1985-10-02 Entladungsangeregter Laser zur Erzeugung kurzer Pulse
DE3587852T DE3587852T2 (de) 1984-10-09 1985-10-02 Kurzpulslaservorrichtung vom Entladungsanregungstyp.
DE19853588137 DE3588137T2 (de) 1984-10-09 1985-10-02 Entladungsangeregtes Lasergerät
EP94114362A EP0637106B1 (en) 1984-10-09 1985-10-02 Discharge excitation type laser device
CA000492327A CA1259122A (en) 1984-10-09 1985-10-04 Discharge excitation type short pulse laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21284384A JPS6190486A (ja) 1984-10-09 1984-10-09 放電励起型短パルスレ−ザ装置

Publications (2)

Publication Number Publication Date
JPS6190486A true JPS6190486A (ja) 1986-05-08
JPH0344429B2 JPH0344429B2 (enrdf_load_stackoverflow) 1991-07-05

Family

ID=16629254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21284384A Granted JPS6190486A (ja) 1984-10-09 1984-10-09 放電励起型短パルスレ−ザ装置

Country Status (1)

Country Link
JP (1) JPS6190486A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988000403A1 (en) * 1986-06-30 1988-01-14 Kabushiki Kaisha Komatsu Seisakusho Gas laser
JPS63229777A (ja) * 1987-03-18 1988-09-26 Mitsubishi Electric Corp パルスレ−ザ装置
JPH04221869A (ja) * 1990-12-21 1992-08-12 Mitsubishi Electric Corp エキシマレーザ装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4729355U (enrdf_load_stackoverflow) * 1971-04-26 1972-12-04
JPS4975093A (enrdf_load_stackoverflow) * 1972-10-17 1974-07-19
JPS5810872A (ja) * 1981-07-14 1983-01-21 Toshiba Corp 太陽電池の製造方法
JPS5848485A (ja) * 1981-09-16 1983-03-22 Mitsubishi Electric Corp パルスレ−ザ発振器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4729355U (enrdf_load_stackoverflow) * 1971-04-26 1972-12-04
JPS4975093A (enrdf_load_stackoverflow) * 1972-10-17 1974-07-19
JPS5810872A (ja) * 1981-07-14 1983-01-21 Toshiba Corp 太陽電池の製造方法
JPS5848485A (ja) * 1981-09-16 1983-03-22 Mitsubishi Electric Corp パルスレ−ザ発振器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988000403A1 (en) * 1986-06-30 1988-01-14 Kabushiki Kaisha Komatsu Seisakusho Gas laser
JPS63229777A (ja) * 1987-03-18 1988-09-26 Mitsubishi Electric Corp パルスレ−ザ装置
JPH04221869A (ja) * 1990-12-21 1992-08-12 Mitsubishi Electric Corp エキシマレーザ装置

Also Published As

Publication number Publication date
JPH0344429B2 (enrdf_load_stackoverflow) 1991-07-05

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term