JPS618930A - 半導体ウエーハの標準化処理方法 - Google Patents
半導体ウエーハの標準化処理方法Info
- Publication number
- JPS618930A JPS618930A JP4501985A JP4501985A JPS618930A JP S618930 A JPS618930 A JP S618930A JP 4501985 A JP4501985 A JP 4501985A JP 4501985 A JP4501985 A JP 4501985A JP S618930 A JPS618930 A JP S618930A
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- wafer
- clusters
- oxygen
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 41
- 239000004065 semiconductor Substances 0.000 title claims description 10
- 235000012431 wafers Nutrition 0.000 claims description 107
- 238000010438 heat treatment Methods 0.000 claims description 21
- 238000009833 condensation Methods 0.000 claims description 18
- 230000005494 condensation Effects 0.000 claims description 18
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 14
- 238000012545 processing Methods 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 125000004429 atom Chemical group 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 230000015271 coagulation Effects 0.000 claims description 3
- 238000005345 coagulation Methods 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 47
- 229910052760 oxygen Inorganic materials 0.000 description 47
- 239000001301 oxygen Substances 0.000 description 47
- 238000004519 manufacturing process Methods 0.000 description 15
- 230000008569 process Effects 0.000 description 13
- 101100137826 Streptococcus pneumoniae (strain ATCC BAA-255 / R6) prsA gene Proteins 0.000 description 12
- 238000012360 testing method Methods 0.000 description 12
- 238000009826 distribution Methods 0.000 description 10
- 230000006911 nucleation Effects 0.000 description 8
- 238000010899 nucleation Methods 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000005247 gettering Methods 0.000 description 5
- 239000006104 solid solution Substances 0.000 description 5
- 238000011282 treatment Methods 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000006978 adaptation Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000007669 thermal treatment Methods 0.000 description 4
- 238000004566 IR spectroscopy Methods 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 230000000087 stabilizing effect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 206010027476 Metastases Diseases 0.000 description 1
- 241001372564 Piona Species 0.000 description 1
- 238000004854 X-ray topography Methods 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000011534 incubation Methods 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4501985A JPS618930A (ja) | 1984-06-20 | 1985-03-08 | 半導体ウエーハの標準化処理方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP84430020.2 | 1984-06-20 | ||
| JP4501985A JPS618930A (ja) | 1984-06-20 | 1985-03-08 | 半導体ウエーハの標準化処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS618930A true JPS618930A (ja) | 1986-01-16 |
| JPH0527974B2 JPH0527974B2 (enrdf_load_stackoverflow) | 1993-04-22 |
Family
ID=12707630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4501985A Granted JPS618930A (ja) | 1984-06-20 | 1985-03-08 | 半導体ウエーハの標準化処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS618930A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992005578A1 (en) * | 1990-09-14 | 1992-04-02 | Komatsu Electronic Metals Co., Ltd. | Semiconductor device manufacturing process |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167637A (en) * | 1981-03-11 | 1982-10-15 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1985
- 1985-03-08 JP JP4501985A patent/JPS618930A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167637A (en) * | 1981-03-11 | 1982-10-15 | Fujitsu Ltd | Manufacture of semiconductor device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992005578A1 (en) * | 1990-09-14 | 1992-04-02 | Komatsu Electronic Metals Co., Ltd. | Semiconductor device manufacturing process |
| US5506154A (en) * | 1990-09-14 | 1996-04-09 | Komatsu Electronic Metals Co., Ltd. | Process for preheat treatment of semiconductor wafers |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527974B2 (enrdf_load_stackoverflow) | 1993-04-22 |
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