JPS6186934U - - Google Patents

Info

Publication number
JPS6186934U
JPS6186934U JP17037884U JP17037884U JPS6186934U JP S6186934 U JPS6186934 U JP S6186934U JP 17037884 U JP17037884 U JP 17037884U JP 17037884 U JP17037884 U JP 17037884U JP S6186934 U JPS6186934 U JP S6186934U
Authority
JP
Japan
Prior art keywords
wafer
heat source
bell jar
entire surface
uniformly heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17037884U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17037884U priority Critical patent/JPS6186934U/ja
Publication of JPS6186934U publication Critical patent/JPS6186934U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Resistance Heating (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の要部の断面図、第
２図はその一部を截断した正面図を示す。 １…ベル・ジヤー、２…基台、３…加熱室、４
…支持棒、５…半導体ウエハ、６…反射板、７…
ランプ熱源、８…リング状端面部、９…赤外線ラ
ンプ、１０…リフレクタ、１１…ランプハウス、
１２…ガイドシヤフト、１３…揺動台、１４…モ
ータ、１５…カム、１６…真空排気孔、１７…不
活性ガス吸入孔、１８…ガイドウオール、１９…
ケーシング、２０…間隙、２１…冷却空気吸入孔
。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハを基台上に間隔を置いて支持すると共に
    ベル・ジヤーで覆い、該ベル・ジヤーの上部に前
    記ウエハの全面に亘つて均一に加熱するランプ熱
    源を配設すると共に該基台上に該熱源の反射光を
    前記ウエハの端部に照射する反射板を配設したこ
    とを特徴とするウエハ全面を均一に加熱する加熱
    装置。
JP17037884U 1984-11-12 1984-11-12 Pending JPS6186934U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17037884U JPS6186934U (ja) 1984-11-12 1984-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17037884U JPS6186934U (ja) 1984-11-12 1984-11-12

Publications (1)

Publication Number Publication Date
JPS6186934U true JPS6186934U (ja) 1986-06-07

Family

ID=30728085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17037884U Pending JPS6186934U (ja) 1984-11-12 1984-11-12

Country Status (1)

Country Link
JP (1) JPS6186934U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0461294U (ja) * 1990-09-28 1992-05-26

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178718A (ja) * 1983-03-29 1984-10-11 Sony Corp 半導体基体の処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178718A (ja) * 1983-03-29 1984-10-11 Sony Corp 半導体基体の処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0461294U (ja) * 1990-09-28 1992-05-26

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